8/8/2011	9:13:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	9:13:44 AM	Recipe started at 9:13 AM
8/8/2011	9:13:44 AM	Helium valve closed
8/8/2011	9:13:44 AM	H2 valve closed
8/8/2011	9:13:44 AM	BCl3 valve closed
8/8/2011	9:13:44 AM	PH3 valve closed
8/8/2011	9:13:44 AM	SiCl4 pre valve closed
8/8/2011	9:13:44 AM	SiCl4 post valve closed
8/8/2011	9:13:44 AM	Main Vac valve closed
8/8/2011	9:13:44 AM	Bypass valve closed
8/8/2011	9:13:44 AM	Bubbler valve closed
8/8/2011	9:13:44 AM	Helium MFC set to  0.000000
8/8/2011	9:13:44 AM	H2 MFC set to  0.000000
8/8/2011	9:13:44 AM	BCl3 MFC set to  0.000000
8/8/2011	9:13:44 AM	PHl3 MFC set to  0.000000
8/8/2011	9:13:44 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:13:44 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:13:44 AM	Tube furnace set to 0
8/8/2011	9:13:47 AM	H2 valve closed
8/8/2011	9:13:47 AM	BCl3 valve closed
8/8/2011	9:13:47 AM	PH3 valve closed
8/8/2011	9:13:47 AM	SiCl4 pre valve closed
8/8/2011	9:13:47 AM	SiCl4 post valve closed
8/8/2011	9:13:47 AM	Main Vac valve closed
8/8/2011	9:13:47 AM	Bypass valve closed
8/8/2011	9:13:47 AM	Bubbler valve closed
8/8/2011	9:13:47 AM	Helium valve opened
8/8/2011	9:13:47 AM	Helium MFC set to  500.000000
8/8/2011	9:13:47 AM	H2 MFC set to  0.000000
8/8/2011	9:13:47 AM	BCl3 MFC set to  0.000000
8/8/2011	9:13:47 AM	PHl3 MFC set to  0.000000
8/8/2011	9:13:47 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:13:47 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:13:47 AM	Tube furnace set to 0
8/8/2011	9:14:53 AM	Helium valve closed
8/8/2011	9:14:53 AM	H2 valve closed
8/8/2011	9:14:53 AM	BCl3 valve closed
8/8/2011	9:14:53 AM	PH3 valve closed
8/8/2011	9:14:53 AM	SiCl4 pre valve closed
8/8/2011	9:14:53 AM	SiCl4 post valve closed
8/8/2011	9:14:53 AM	Main Vac valve closed
8/8/2011	9:14:53 AM	Bypass valve closed
8/8/2011	9:14:53 AM	Bubbler valve closed
8/8/2011	9:14:53 AM	Helium MFC set to  0.000000
8/8/2011	9:14:53 AM	H2 MFC set to  0.000000
8/8/2011	9:14:53 AM	BCl3 MFC set to  0.000000
8/8/2011	9:14:53 AM	PHl3 MFC set to  0.000000
8/8/2011	9:14:53 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:14:53 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:14:53 AM	Tube furnace set to 0
8/8/2011	9:14:54 AM	Run finished at 9:14 AM
8/8/2011	9:14:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	9:18:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	9:18:43 AM	Recipe started at 9:18 AM
8/8/2011	9:18:43 AM	Helium valve closed
8/8/2011	9:18:43 AM	H2 valve closed
8/8/2011	9:18:43 AM	BCl3 valve closed
8/8/2011	9:18:43 AM	PH3 valve closed
8/8/2011	9:18:43 AM	SiCl4 pre valve closed
8/8/2011	9:18:43 AM	SiCl4 post valve closed
8/8/2011	9:18:43 AM	Main Vac valve closed
8/8/2011	9:18:43 AM	Bubbler valve closed
8/8/2011	9:18:43 AM	Bypass valve opened
8/8/2011	9:18:43 AM	Helium MFC set to  0.000000
8/8/2011	9:18:43 AM	H2 MFC set to  0.000000
8/8/2011	9:18:43 AM	BCl3 MFC set to  0.000000
8/8/2011	9:18:43 AM	PHl3 MFC set to  0.000000
8/8/2011	9:18:43 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:18:43 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:18:43 AM	Tube furnace set to 0
8/8/2011	9:19:49 AM	Helium valve closed
8/8/2011	9:19:49 AM	H2 valve closed
8/8/2011	9:19:49 AM	BCl3 valve closed
8/8/2011	9:19:49 AM	PH3 valve closed
8/8/2011	9:19:49 AM	SiCl4 pre valve closed
8/8/2011	9:19:49 AM	SiCl4 post valve closed
8/8/2011	9:19:49 AM	Main Vac valve closed
8/8/2011	9:19:49 AM	Bubbler valve closed
8/8/2011	9:19:49 AM	Bypass valve opened
8/8/2011	9:19:49 AM	Helium MFC set to  0.000000
8/8/2011	9:19:49 AM	H2 MFC set to  0.000000
8/8/2011	9:19:49 AM	BCl3 MFC set to  0.000000
8/8/2011	9:19:49 AM	PHl3 MFC set to  0.000000
8/8/2011	9:19:49 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:19:49 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:19:49 AM	Tube furnace set to 0
8/8/2011	9:20:49 AM	Helium valve closed
8/8/2011	9:20:49 AM	H2 valve closed
8/8/2011	9:20:49 AM	BCl3 valve closed
8/8/2011	9:20:49 AM	PH3 valve closed
8/8/2011	9:20:49 AM	SiCl4 pre valve closed
8/8/2011	9:20:49 AM	SiCl4 post valve closed
8/8/2011	9:20:49 AM	Bypass valve closed
8/8/2011	9:20:49 AM	Bubbler valve closed
8/8/2011	9:20:49 AM	Main Vac valve opened
8/8/2011	9:20:49 AM	Helium MFC set to  0.000000
8/8/2011	9:20:49 AM	H2 MFC set to  0.000000
8/8/2011	9:20:49 AM	BCl3 MFC set to  0.000000
8/8/2011	9:20:49 AM	PHl3 MFC set to  0.000000
8/8/2011	9:20:49 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:20:49 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:20:50 AM	Tube furnace set to 0
8/8/2011	9:20:51 AM	Run finished at 9:20 AM
8/8/2011	9:20:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	9:21:47 AM	Helium MFC set to  20.000000
8/8/2011	9:21:52 AM	Helium valve opened
8/8/2011	9:24:58 AM	Helium valve closed
8/8/2011	9:25:01 AM	Helium MFC set to  0.000000
8/8/2011	9:29:42 AM	Helium MFC set to  20.000000
8/8/2011	9:30:39 AM	Helium valve opened
8/8/2011	9:31:15 AM	Helium valve closed
8/8/2011	9:31:18 AM	Helium MFC set to  0.000000
8/8/2011	9:31:58 AM	Main Vac valve closed
8/8/2011	9:32:10 AM	Main Vac valve opened
8/8/2011	9:33:01 AM	Helium MFC set to  10.000000
8/8/2011	9:33:01 AM	Helium valve opened
8/8/2011	9:34:14 AM	Helium valve closed
8/8/2011	9:53:38 AM	Recipe started at 9:53 AM
8/8/2011	9:53:38 AM	Helium valve closed
8/8/2011	9:53:38 AM	H2 valve closed
8/8/2011	9:53:38 AM	BCl3 valve closed
8/8/2011	9:53:38 AM	PH3 valve closed
8/8/2011	9:53:38 AM	SiCl4 pre valve closed
8/8/2011	9:53:38 AM	SiCl4 post valve closed
8/8/2011	9:53:38 AM	Main Vac valve closed
8/8/2011	9:53:38 AM	Bypass valve closed
8/8/2011	9:53:38 AM	Bubbler valve closed
8/8/2011	9:53:38 AM	Helium MFC set to  0.000000
8/8/2011	9:53:38 AM	H2 MFC set to  0.000000
8/8/2011	9:53:38 AM	BCl3 MFC set to  0.000000
8/8/2011	9:53:38 AM	PHl3 MFC set to  0.000000
8/8/2011	9:53:38 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:53:38 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:53:38 AM	Tube furnace set to 0
8/8/2011	9:53:41 AM	Helium valve closed
8/8/2011	9:53:41 AM	BCl3 valve closed
8/8/2011	9:53:41 AM	PH3 valve closed
8/8/2011	9:53:41 AM	SiCl4 pre valve closed
8/8/2011	9:53:41 AM	SiCl4 post valve closed
8/8/2011	9:53:41 AM	Main Vac valve closed
8/8/2011	9:53:41 AM	Bypass valve closed
8/8/2011	9:53:41 AM	Bubbler valve closed
8/8/2011	9:53:41 AM	H2 valve opened
8/8/2011	9:53:41 AM	Helium MFC set to  0.000000
8/8/2011	9:53:41 AM	H2 MFC set to  500.000000
8/8/2011	9:53:41 AM	BCl3 MFC set to  0.000000
8/8/2011	9:53:41 AM	PHl3 MFC set to  0.000000
8/8/2011	9:53:41 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:53:41 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:53:41 AM	Tube furnace set to 0
8/8/2011	9:54:48 AM	Helium valve closed
8/8/2011	9:54:48 AM	BCl3 valve closed
8/8/2011	9:54:48 AM	PH3 valve closed
8/8/2011	9:54:48 AM	SiCl4 pre valve closed
8/8/2011	9:54:48 AM	SiCl4 post valve closed
8/8/2011	9:54:48 AM	Main Vac valve closed
8/8/2011	9:54:48 AM	Bypass valve closed
8/8/2011	9:54:48 AM	H2 valve opened
8/8/2011	9:54:48 AM	Bubbler valve opened
8/8/2011	9:54:48 AM	Helium MFC set to  0.000000
8/8/2011	9:54:48 AM	H2 MFC set to  500.000000
8/8/2011	9:54:48 AM	BCl3 MFC set to  0.000000
8/8/2011	9:54:48 AM	PHl3 MFC set to  0.000000
8/8/2011	9:54:48 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:54:48 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:54:48 AM	Tube furnace set to 0
8/8/2011	9:54:49 AM	Helium valve closed
8/8/2011	9:54:49 AM	BCl3 valve closed
8/8/2011	9:54:49 AM	PH3 valve closed
8/8/2011	9:54:49 AM	SiCl4 pre valve closed
8/8/2011	9:54:49 AM	SiCl4 post valve closed
8/8/2011	9:54:49 AM	Main Vac valve closed
8/8/2011	9:54:49 AM	Bypass valve closed
8/8/2011	9:54:49 AM	H2 valve opened
8/8/2011	9:54:49 AM	Bubbler valve opened
8/8/2011	9:54:49 AM	Helium MFC set to  0.000000
8/8/2011	9:54:49 AM	H2 MFC set to  500.000000
8/8/2011	9:54:49 AM	BCl3 MFC set to  0.000000
8/8/2011	9:54:49 AM	PHl3 MFC set to  0.000000
8/8/2011	9:54:49 AM	SiCl4 MFC set to  0.000000
8/8/2011	9:54:49 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:54:50 AM	Tube furnace set to 1000
8/8/2011	10:14:50 AM	Helium valve closed
8/8/2011	10:14:50 AM	PH3 valve closed
8/8/2011	10:14:50 AM	Main Vac valve closed
8/8/2011	10:14:50 AM	Bypass valve closed
8/8/2011	10:14:50 AM	H2 valve opened
8/8/2011	10:14:50 AM	BCl3 valve opened
8/8/2011	10:14:50 AM	SiCl4 pre valve opened
8/8/2011	10:14:50 AM	SiCl4 post valve opened
8/8/2011	10:14:50 AM	Bubbler valve opened
8/8/2011	10:14:50 AM	Helium MFC set to  0.000000
8/8/2011	10:14:50 AM	H2 MFC set to  500.000000
8/8/2011	10:14:50 AM	BCl3 MFC set to  2.200000
8/8/2011	10:14:50 AM	PHl3 MFC set to  0.000000
8/8/2011	10:14:50 AM	SiCl4 MFC set to  50.000000
8/8/2011	10:14:50 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:14:50 AM	Tube furnace set to 1000
8/8/2011	10:29:50 AM	Helium valve closed
8/8/2011	10:29:50 AM	BCl3 valve closed
8/8/2011	10:29:50 AM	PH3 valve closed
8/8/2011	10:29:50 AM	SiCl4 pre valve closed
8/8/2011	10:29:50 AM	SiCl4 post valve closed
8/8/2011	10:29:50 AM	Main Vac valve closed
8/8/2011	10:29:50 AM	Bypass valve closed
8/8/2011	10:29:50 AM	H2 valve opened
8/8/2011	10:29:50 AM	Bubbler valve opened
8/8/2011	10:29:50 AM	Helium MFC set to  0.000000
8/8/2011	10:29:50 AM	H2 MFC set to  500.000000
8/8/2011	10:29:50 AM	BCl3 MFC set to  0.000000
8/8/2011	10:29:50 AM	PHl3 MFC set to  0.000000
8/8/2011	10:29:50 AM	SiCl4 MFC set to  0.000000
8/8/2011	10:29:50 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:29:50 AM	Tube furnace set to 750
8/8/2011	10:34:50 AM	H2 valve closed
8/8/2011	10:34:50 AM	BCl3 valve closed
8/8/2011	10:34:50 AM	PH3 valve closed
8/8/2011	10:34:50 AM	SiCl4 pre valve closed
8/8/2011	10:34:50 AM	SiCl4 post valve closed
8/8/2011	10:34:50 AM	Main Vac valve closed
8/8/2011	10:34:50 AM	Bypass valve closed
8/8/2011	10:34:50 AM	Helium valve opened
8/8/2011	10:34:50 AM	Bubbler valve opened
8/8/2011	10:34:50 AM	Helium MFC set to  400.000000
8/8/2011	10:34:50 AM	H2 MFC set to  0.000000
8/8/2011	10:34:50 AM	BCl3 MFC set to  0.000000
8/8/2011	10:34:50 AM	PHl3 MFC set to  0.000000
8/8/2011	10:34:50 AM	SiCl4 MFC set to  0.000000
8/8/2011	10:34:50 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:34:50 AM	Tube furnace set to 0
8/8/2011	10:54:50 AM	Helium valve closed
8/8/2011	10:54:50 AM	H2 valve closed
8/8/2011	10:54:50 AM	BCl3 valve closed
8/8/2011	10:54:50 AM	PH3 valve closed
8/8/2011	10:54:50 AM	SiCl4 pre valve closed
8/8/2011	10:54:50 AM	SiCl4 post valve closed
8/8/2011	10:54:50 AM	Main Vac valve closed
8/8/2011	10:54:50 AM	Bypass valve closed
8/8/2011	10:54:50 AM	Bubbler valve closed
8/8/2011	10:54:50 AM	Helium MFC set to  0.000000
8/8/2011	10:54:50 AM	H2 MFC set to  0.000000
8/8/2011	10:54:50 AM	BCl3 MFC set to  0.000000
8/8/2011	10:54:50 AM	PHl3 MFC set to  0.000000
8/8/2011	10:54:50 AM	SiCl4 MFC set to  0.000000
8/8/2011	10:54:50 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:54:50 AM	Tube furnace set to 0
8/8/2011	10:54:51 AM	Run finished at 10:54 AM
8/8/2011	11:16:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:16:36 AM	Recipe started at 11:16 AM
8/8/2011	11:16:36 AM	Helium valve closed
8/8/2011	11:16:36 AM	H2 valve closed
8/8/2011	11:16:36 AM	BCl3 valve closed
8/8/2011	11:16:36 AM	PH3 valve closed
8/8/2011	11:16:36 AM	SiCl4 pre valve closed
8/8/2011	11:16:36 AM	SiCl4 post valve closed
8/8/2011	11:16:36 AM	Main Vac valve closed
8/8/2011	11:16:36 AM	Bypass valve closed
8/8/2011	11:16:36 AM	Bubbler valve closed
8/8/2011	11:16:36 AM	Helium MFC set to  0.000000
8/8/2011	11:16:36 AM	H2 MFC set to  0.000000
8/8/2011	11:16:36 AM	BCl3 MFC set to  0.000000
8/8/2011	11:16:36 AM	PHl3 MFC set to  0.000000
8/8/2011	11:16:36 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:16:36 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:16:36 AM	Tube furnace set to 0
8/8/2011	11:16:39 AM	H2 valve closed
8/8/2011	11:16:39 AM	BCl3 valve closed
8/8/2011	11:16:39 AM	PH3 valve closed
8/8/2011	11:16:39 AM	SiCl4 pre valve closed
8/8/2011	11:16:39 AM	SiCl4 post valve closed
8/8/2011	11:16:39 AM	Main Vac valve closed
8/8/2011	11:16:39 AM	Bypass valve closed
8/8/2011	11:16:39 AM	Bubbler valve closed
8/8/2011	11:16:39 AM	Helium valve opened
8/8/2011	11:16:39 AM	Helium MFC set to  500.000000
8/8/2011	11:16:39 AM	H2 MFC set to  0.000000
8/8/2011	11:16:39 AM	BCl3 MFC set to  0.000000
8/8/2011	11:16:39 AM	PHl3 MFC set to  0.000000
8/8/2011	11:16:39 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:16:39 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:16:39 AM	Tube furnace set to 0
8/8/2011	11:16:46 AM	Helium valve closed
8/8/2011	11:16:46 AM	H2 valve closed
8/8/2011	11:16:46 AM	BCl3 valve closed
8/8/2011	11:16:46 AM	PH3 valve closed
8/8/2011	11:16:46 AM	SiCl4 pre valve closed
8/8/2011	11:16:46 AM	SiCl4 post valve closed
8/8/2011	11:16:46 AM	Main Vac valve closed
8/8/2011	11:16:46 AM	Bypass valve closed
8/8/2011	11:16:46 AM	Bubbler valve closed
8/8/2011	11:16:46 AM	Helium MFC set to  0.000000
8/8/2011	11:16:46 AM	H2 MFC set to  0.000000
8/8/2011	11:16:46 AM	BCl3 MFC set to  0.000000
8/8/2011	11:16:46 AM	PHl3 MFC set to  0.000000
8/8/2011	11:16:46 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:16:46 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:16:46 AM	Tube furnace set to 0
8/8/2011	11:16:47 AM	Run finished at 11:16 AM
8/8/2011	11:16:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:23:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:23:07 AM	Recipe started at 11:23 AM
8/8/2011	11:23:07 AM	Helium valve closed
8/8/2011	11:23:07 AM	H2 valve closed
8/8/2011	11:23:07 AM	BCl3 valve closed
8/8/2011	11:23:07 AM	PH3 valve closed
8/8/2011	11:23:07 AM	SiCl4 pre valve closed
8/8/2011	11:23:07 AM	SiCl4 post valve closed
8/8/2011	11:23:07 AM	Main Vac valve closed
8/8/2011	11:23:07 AM	Bypass valve closed
8/8/2011	11:23:07 AM	Bubbler valve closed
8/8/2011	11:23:07 AM	Helium MFC set to  0.000000
8/8/2011	11:23:07 AM	H2 MFC set to  0.000000
8/8/2011	11:23:07 AM	BCl3 MFC set to  0.000000
8/8/2011	11:23:07 AM	PHl3 MFC set to  0.000000
8/8/2011	11:23:07 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:23:07 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:23:07 AM	Tube furnace set to 0
8/8/2011	11:23:10 AM	H2 valve closed
8/8/2011	11:23:10 AM	BCl3 valve closed
8/8/2011	11:23:10 AM	PH3 valve closed
8/8/2011	11:23:10 AM	SiCl4 pre valve closed
8/8/2011	11:23:10 AM	SiCl4 post valve closed
8/8/2011	11:23:10 AM	Main Vac valve closed
8/8/2011	11:23:10 AM	Bypass valve closed
8/8/2011	11:23:10 AM	Bubbler valve closed
8/8/2011	11:23:10 AM	Helium valve opened
8/8/2011	11:23:10 AM	Helium MFC set to  500.000000
8/8/2011	11:23:10 AM	H2 MFC set to  0.000000
8/8/2011	11:23:10 AM	BCl3 MFC set to  0.000000
8/8/2011	11:23:10 AM	PHl3 MFC set to  0.000000
8/8/2011	11:23:10 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:23:10 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:23:10 AM	Tube furnace set to 0
8/8/2011	11:23:11 AM	Helium valve closed
8/8/2011	11:23:11 AM	H2 valve closed
8/8/2011	11:23:11 AM	BCl3 valve closed
8/8/2011	11:23:11 AM	PH3 valve closed
8/8/2011	11:23:11 AM	SiCl4 pre valve closed
8/8/2011	11:23:11 AM	SiCl4 post valve closed
8/8/2011	11:23:11 AM	Main Vac valve closed
8/8/2011	11:23:11 AM	Bypass valve closed
8/8/2011	11:23:11 AM	Bubbler valve closed
8/8/2011	11:23:11 AM	Helium MFC set to  0.000000
8/8/2011	11:23:11 AM	H2 MFC set to  0.000000
8/8/2011	11:23:11 AM	BCl3 MFC set to  0.000000
8/8/2011	11:23:11 AM	PHl3 MFC set to  0.000000
8/8/2011	11:23:11 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:23:11 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:23:11 AM	Tube furnace set to 0
8/8/2011	11:23:12 AM	Run finished at 11:23 AM
8/8/2011	11:23:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:25:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	11:25:52 AM	Recipe started at 11:25 AM
8/8/2011	11:25:52 AM	Helium valve closed
8/8/2011	11:25:52 AM	H2 valve closed
8/8/2011	11:25:52 AM	BCl3 valve closed
8/8/2011	11:25:52 AM	PH3 valve closed
8/8/2011	11:25:52 AM	SiCl4 pre valve closed
8/8/2011	11:25:52 AM	SiCl4 post valve closed
8/8/2011	11:25:52 AM	Main Vac valve closed
8/8/2011	11:25:52 AM	Bubbler valve closed
8/8/2011	11:25:52 AM	Bypass valve opened
8/8/2011	11:25:52 AM	Helium MFC set to  0.000000
8/8/2011	11:25:52 AM	H2 MFC set to  0.000000
8/8/2011	11:25:52 AM	BCl3 MFC set to  0.000000
8/8/2011	11:25:52 AM	PHl3 MFC set to  0.000000
8/8/2011	11:25:52 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:25:52 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:25:52 AM	Tube furnace set to 0
8/8/2011	11:26:57 AM	Helium valve closed
8/8/2011	11:26:57 AM	H2 valve closed
8/8/2011	11:26:57 AM	BCl3 valve closed
8/8/2011	11:26:57 AM	PH3 valve closed
8/8/2011	11:26:57 AM	SiCl4 pre valve closed
8/8/2011	11:26:57 AM	SiCl4 post valve closed
8/8/2011	11:26:57 AM	Main Vac valve closed
8/8/2011	11:26:57 AM	Bubbler valve closed
8/8/2011	11:26:57 AM	Bypass valve opened
8/8/2011	11:26:57 AM	Helium MFC set to  0.000000
8/8/2011	11:26:57 AM	H2 MFC set to  0.000000
8/8/2011	11:26:57 AM	BCl3 MFC set to  0.000000
8/8/2011	11:26:57 AM	PHl3 MFC set to  0.000000
8/8/2011	11:26:57 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:26:57 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:26:57 AM	Tube furnace set to 0
8/8/2011	11:27:57 AM	Helium valve closed
8/8/2011	11:27:57 AM	H2 valve closed
8/8/2011	11:27:57 AM	BCl3 valve closed
8/8/2011	11:27:57 AM	PH3 valve closed
8/8/2011	11:27:57 AM	SiCl4 pre valve closed
8/8/2011	11:27:57 AM	SiCl4 post valve closed
8/8/2011	11:27:57 AM	Bypass valve closed
8/8/2011	11:27:57 AM	Bubbler valve closed
8/8/2011	11:27:57 AM	Main Vac valve opened
8/8/2011	11:27:57 AM	Helium MFC set to  0.000000
8/8/2011	11:27:57 AM	H2 MFC set to  0.000000
8/8/2011	11:27:57 AM	BCl3 MFC set to  0.000000
8/8/2011	11:27:57 AM	PHl3 MFC set to  0.000000
8/8/2011	11:27:57 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:27:57 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:27:57 AM	Tube furnace set to 0
8/8/2011	11:27:58 AM	Run finished at 11:27 AM
8/8/2011	11:27:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	11:51:54 AM	Helium MFC set to  0.000000
8/8/2011	11:52:55 AM	Recipe started at 11:52 AM
8/8/2011	11:52:55 AM	Helium valve closed
8/8/2011	11:52:55 AM	H2 valve closed
8/8/2011	11:52:55 AM	BCl3 valve closed
8/8/2011	11:52:55 AM	PH3 valve closed
8/8/2011	11:52:55 AM	SiCl4 pre valve closed
8/8/2011	11:52:55 AM	SiCl4 post valve closed
8/8/2011	11:52:55 AM	Main Vac valve closed
8/8/2011	11:52:55 AM	Bypass valve closed
8/8/2011	11:52:55 AM	Bubbler valve closed
8/8/2011	11:52:55 AM	Helium MFC set to  0.000000
8/8/2011	11:52:55 AM	H2 MFC set to  0.000000
8/8/2011	11:52:55 AM	BCl3 MFC set to  0.000000
8/8/2011	11:52:55 AM	PHl3 MFC set to  0.000000
8/8/2011	11:52:55 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:52:55 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:52:55 AM	Tube furnace set to 0
8/8/2011	11:52:58 AM	Helium valve closed
8/8/2011	11:52:58 AM	BCl3 valve closed
8/8/2011	11:52:58 AM	PH3 valve closed
8/8/2011	11:52:58 AM	SiCl4 pre valve closed
8/8/2011	11:52:58 AM	SiCl4 post valve closed
8/8/2011	11:52:58 AM	Main Vac valve closed
8/8/2011	11:52:58 AM	Bypass valve closed
8/8/2011	11:52:58 AM	Bubbler valve closed
8/8/2011	11:52:58 AM	H2 valve opened
8/8/2011	11:52:58 AM	Helium MFC set to  0.000000
8/8/2011	11:52:58 AM	H2 MFC set to  500.000000
8/8/2011	11:52:58 AM	BCl3 MFC set to  0.000000
8/8/2011	11:52:58 AM	PHl3 MFC set to  0.000000
8/8/2011	11:52:58 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:52:58 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:52:58 AM	Tube furnace set to 0
8/8/2011	11:54:06 AM	Helium valve closed
8/8/2011	11:54:06 AM	BCl3 valve closed
8/8/2011	11:54:06 AM	PH3 valve closed
8/8/2011	11:54:06 AM	SiCl4 pre valve closed
8/8/2011	11:54:06 AM	SiCl4 post valve closed
8/8/2011	11:54:06 AM	Main Vac valve closed
8/8/2011	11:54:06 AM	Bypass valve closed
8/8/2011	11:54:06 AM	H2 valve opened
8/8/2011	11:54:06 AM	Bubbler valve opened
8/8/2011	11:54:06 AM	Helium MFC set to  0.000000
8/8/2011	11:54:06 AM	H2 MFC set to  500.000000
8/8/2011	11:54:06 AM	BCl3 MFC set to  0.000000
8/8/2011	11:54:06 AM	PHl3 MFC set to  0.000000
8/8/2011	11:54:06 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:54:06 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:54:06 AM	Tube furnace set to 0
8/8/2011	11:54:07 AM	Helium valve closed
8/8/2011	11:54:07 AM	BCl3 valve closed
8/8/2011	11:54:07 AM	PH3 valve closed
8/8/2011	11:54:07 AM	SiCl4 pre valve closed
8/8/2011	11:54:07 AM	SiCl4 post valve closed
8/8/2011	11:54:07 AM	Main Vac valve closed
8/8/2011	11:54:07 AM	Bypass valve closed
8/8/2011	11:54:07 AM	H2 valve opened
8/8/2011	11:54:07 AM	Bubbler valve opened
8/8/2011	11:54:07 AM	Helium MFC set to  0.000000
8/8/2011	11:54:07 AM	H2 MFC set to  500.000000
8/8/2011	11:54:07 AM	BCl3 MFC set to  0.000000
8/8/2011	11:54:07 AM	PHl3 MFC set to  0.000000
8/8/2011	11:54:07 AM	SiCl4 MFC set to  0.000000
8/8/2011	11:54:07 AM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:54:07 AM	Tube furnace set to 1000
8/8/2011	12:14:07 PM	Helium valve closed
8/8/2011	12:14:07 PM	PH3 valve closed
8/8/2011	12:14:07 PM	Main Vac valve closed
8/8/2011	12:14:07 PM	Bypass valve closed
8/8/2011	12:14:07 PM	H2 valve opened
8/8/2011	12:14:07 PM	BCl3 valve opened
8/8/2011	12:14:07 PM	SiCl4 pre valve opened
8/8/2011	12:14:07 PM	SiCl4 post valve opened
8/8/2011	12:14:07 PM	Bubbler valve opened
8/8/2011	12:14:07 PM	Helium MFC set to  0.000000
8/8/2011	12:14:07 PM	H2 MFC set to  500.000000
8/8/2011	12:14:07 PM	BCl3 MFC set to  2.200000
8/8/2011	12:14:07 PM	PHl3 MFC set to  0.000000
8/8/2011	12:14:07 PM	SiCl4 MFC set to  50.000000
8/8/2011	12:14:07 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	12:14:07 PM	Tube furnace set to 1000
8/8/2011	12:32:07 PM	Helium valve closed
8/8/2011	12:32:07 PM	BCl3 valve closed
8/8/2011	12:32:07 PM	PH3 valve closed
8/8/2011	12:32:07 PM	SiCl4 pre valve closed
8/8/2011	12:32:07 PM	SiCl4 post valve closed
8/8/2011	12:32:07 PM	Main Vac valve closed
8/8/2011	12:32:07 PM	Bypass valve closed
8/8/2011	12:32:07 PM	H2 valve opened
8/8/2011	12:32:07 PM	Bubbler valve opened
8/8/2011	12:32:07 PM	Helium MFC set to  0.000000
8/8/2011	12:32:07 PM	H2 MFC set to  500.000000
8/8/2011	12:32:07 PM	BCl3 MFC set to  0.000000
8/8/2011	12:32:07 PM	PHl3 MFC set to  0.000000
8/8/2011	12:32:07 PM	SiCl4 MFC set to  0.000000
8/8/2011	12:32:07 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	12:32:07 PM	Tube furnace set to 750
8/8/2011	12:37:07 PM	H2 valve closed
8/8/2011	12:37:07 PM	BCl3 valve closed
8/8/2011	12:37:07 PM	PH3 valve closed
8/8/2011	12:37:07 PM	SiCl4 pre valve closed
8/8/2011	12:37:07 PM	SiCl4 post valve closed
8/8/2011	12:37:07 PM	Main Vac valve closed
8/8/2011	12:37:07 PM	Bypass valve closed
8/8/2011	12:37:07 PM	Helium valve opened
8/8/2011	12:37:07 PM	Bubbler valve opened
8/8/2011	12:37:07 PM	Helium MFC set to  400.000000
8/8/2011	12:37:07 PM	H2 MFC set to  0.000000
8/8/2011	12:37:07 PM	BCl3 MFC set to  0.000000
8/8/2011	12:37:07 PM	PHl3 MFC set to  0.000000
8/8/2011	12:37:07 PM	SiCl4 MFC set to  0.000000
8/8/2011	12:37:07 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	12:37:08 PM	Tube furnace set to 0
8/8/2011	12:57:07 PM	Helium valve closed
8/8/2011	12:57:07 PM	H2 valve closed
8/8/2011	12:57:07 PM	BCl3 valve closed
8/8/2011	12:57:07 PM	PH3 valve closed
8/8/2011	12:57:07 PM	SiCl4 pre valve closed
8/8/2011	12:57:07 PM	SiCl4 post valve closed
8/8/2011	12:57:08 PM	Main Vac valve closed
8/8/2011	12:57:08 PM	Bypass valve closed
8/8/2011	12:57:08 PM	Bubbler valve closed
8/8/2011	12:57:08 PM	Helium MFC set to  0.000000
8/8/2011	12:57:08 PM	H2 MFC set to  0.000000
8/8/2011	12:57:08 PM	BCl3 MFC set to  0.000000
8/8/2011	12:57:08 PM	PHl3 MFC set to  0.000000
8/8/2011	12:57:08 PM	SiCl4 MFC set to  0.000000
8/8/2011	12:57:08 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	12:57:08 PM	Tube furnace set to 0
8/8/2011	12:57:09 PM	Run finished at 12:57 PM
8/8/2011	1:47:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:47:39 PM	Recipe started at 1:47 PM
8/8/2011	1:47:39 PM	Helium valve closed
8/8/2011	1:47:39 PM	H2 valve closed
8/8/2011	1:47:39 PM	BCl3 valve closed
8/8/2011	1:47:39 PM	PH3 valve closed
8/8/2011	1:47:39 PM	SiCl4 pre valve closed
8/8/2011	1:47:39 PM	SiCl4 post valve closed
8/8/2011	1:47:39 PM	Main Vac valve closed
8/8/2011	1:47:39 PM	Bypass valve closed
8/8/2011	1:47:39 PM	Bubbler valve closed
8/8/2011	1:47:39 PM	Helium MFC set to  0.000000
8/8/2011	1:47:39 PM	H2 MFC set to  0.000000
8/8/2011	1:47:39 PM	BCl3 MFC set to  0.000000
8/8/2011	1:47:39 PM	PHl3 MFC set to  0.000000
8/8/2011	1:47:39 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:47:39 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:47:39 PM	Tube furnace set to 0
8/8/2011	1:47:42 PM	H2 valve closed
8/8/2011	1:47:42 PM	BCl3 valve closed
8/8/2011	1:47:42 PM	PH3 valve closed
8/8/2011	1:47:42 PM	SiCl4 pre valve closed
8/8/2011	1:47:42 PM	SiCl4 post valve closed
8/8/2011	1:47:42 PM	Main Vac valve closed
8/8/2011	1:47:42 PM	Bypass valve closed
8/8/2011	1:47:42 PM	Bubbler valve closed
8/8/2011	1:47:42 PM	Helium valve opened
8/8/2011	1:47:42 PM	Helium MFC set to  500.000000
8/8/2011	1:47:42 PM	H2 MFC set to  0.000000
8/8/2011	1:47:42 PM	BCl3 MFC set to  0.000000
8/8/2011	1:47:42 PM	PHl3 MFC set to  0.000000
8/8/2011	1:47:42 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:47:42 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:47:42 PM	Tube furnace set to 0
8/8/2011	1:47:47 PM	Helium valve closed
8/8/2011	1:47:47 PM	H2 valve closed
8/8/2011	1:47:47 PM	BCl3 valve closed
8/8/2011	1:47:47 PM	PH3 valve closed
8/8/2011	1:47:47 PM	SiCl4 pre valve closed
8/8/2011	1:47:47 PM	SiCl4 post valve closed
8/8/2011	1:47:47 PM	Main Vac valve closed
8/8/2011	1:47:47 PM	Bypass valve closed
8/8/2011	1:47:47 PM	Bubbler valve closed
8/8/2011	1:47:47 PM	Helium MFC set to  0.000000
8/8/2011	1:47:47 PM	H2 MFC set to  0.000000
8/8/2011	1:47:47 PM	BCl3 MFC set to  0.000000
8/8/2011	1:47:47 PM	PHl3 MFC set to  0.000000
8/8/2011	1:47:47 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:47:47 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:47:47 PM	Tube furnace set to 0
8/8/2011	1:47:48 PM	Run finished at 1:47 PM
8/8/2011	1:47:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:48:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:48:02 PM	Recipe started at 1:48 PM
8/8/2011	1:48:02 PM	Helium valve closed
8/8/2011	1:48:02 PM	H2 valve closed
8/8/2011	1:48:02 PM	BCl3 valve closed
8/8/2011	1:48:02 PM	PH3 valve closed
8/8/2011	1:48:02 PM	SiCl4 pre valve closed
8/8/2011	1:48:02 PM	SiCl4 post valve closed
8/8/2011	1:48:02 PM	Main Vac valve closed
8/8/2011	1:48:02 PM	Bypass valve closed
8/8/2011	1:48:02 PM	Bubbler valve closed
8/8/2011	1:48:02 PM	Helium MFC set to  0.000000
8/8/2011	1:48:02 PM	H2 MFC set to  0.000000
8/8/2011	1:48:02 PM	BCl3 MFC set to  0.000000
8/8/2011	1:48:02 PM	PHl3 MFC set to  0.000000
8/8/2011	1:48:02 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:48:02 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:48:02 PM	Tube furnace set to 0
8/8/2011	1:48:05 PM	H2 valve closed
8/8/2011	1:48:05 PM	BCl3 valve closed
8/8/2011	1:48:05 PM	PH3 valve closed
8/8/2011	1:48:05 PM	SiCl4 pre valve closed
8/8/2011	1:48:05 PM	SiCl4 post valve closed
8/8/2011	1:48:05 PM	Main Vac valve closed
8/8/2011	1:48:05 PM	Bypass valve closed
8/8/2011	1:48:05 PM	Bubbler valve closed
8/8/2011	1:48:05 PM	Helium valve opened
8/8/2011	1:48:05 PM	Helium MFC set to  500.000000
8/8/2011	1:48:05 PM	H2 MFC set to  0.000000
8/8/2011	1:48:05 PM	BCl3 MFC set to  0.000000
8/8/2011	1:48:05 PM	PHl3 MFC set to  0.000000
8/8/2011	1:48:05 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:48:05 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:48:06 PM	Tube furnace set to 0
8/8/2011	1:48:06 PM	Helium valve closed
8/8/2011	1:48:06 PM	H2 valve closed
8/8/2011	1:48:06 PM	BCl3 valve closed
8/8/2011	1:48:06 PM	PH3 valve closed
8/8/2011	1:48:06 PM	SiCl4 pre valve closed
8/8/2011	1:48:06 PM	SiCl4 post valve closed
8/8/2011	1:48:06 PM	Main Vac valve closed
8/8/2011	1:48:06 PM	Bypass valve closed
8/8/2011	1:48:06 PM	Bubbler valve closed
8/8/2011	1:48:06 PM	Helium MFC set to  0.000000
8/8/2011	1:48:06 PM	H2 MFC set to  0.000000
8/8/2011	1:48:06 PM	BCl3 MFC set to  0.000000
8/8/2011	1:48:06 PM	PHl3 MFC set to  0.000000
8/8/2011	1:48:06 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:48:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:48:06 PM	Tube furnace set to 0
8/8/2011	1:48:07 PM	Run finished at 1:48 PM
8/8/2011	1:48:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:49:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:49:56 PM	Recipe started at 1:49 PM
8/8/2011	1:49:56 PM	Helium valve closed
8/8/2011	1:49:56 PM	H2 valve closed
8/8/2011	1:49:56 PM	BCl3 valve closed
8/8/2011	1:49:56 PM	PH3 valve closed
8/8/2011	1:49:56 PM	SiCl4 pre valve closed
8/8/2011	1:49:56 PM	SiCl4 post valve closed
8/8/2011	1:49:56 PM	Main Vac valve closed
8/8/2011	1:49:56 PM	Bypass valve closed
8/8/2011	1:49:56 PM	Bubbler valve closed
8/8/2011	1:49:56 PM	Helium MFC set to  0.000000
8/8/2011	1:49:56 PM	H2 MFC set to  0.000000
8/8/2011	1:49:56 PM	BCl3 MFC set to  0.000000
8/8/2011	1:49:56 PM	PHl3 MFC set to  0.000000
8/8/2011	1:49:56 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:49:56 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:49:56 PM	Tube furnace set to 0
8/8/2011	1:49:59 PM	H2 valve closed
8/8/2011	1:49:59 PM	BCl3 valve closed
8/8/2011	1:49:59 PM	PH3 valve closed
8/8/2011	1:49:59 PM	SiCl4 pre valve closed
8/8/2011	1:49:59 PM	SiCl4 post valve closed
8/8/2011	1:49:59 PM	Main Vac valve closed
8/8/2011	1:49:59 PM	Bypass valve closed
8/8/2011	1:49:59 PM	Bubbler valve closed
8/8/2011	1:49:59 PM	Helium valve opened
8/8/2011	1:49:59 PM	Helium MFC set to  500.000000
8/8/2011	1:49:59 PM	H2 MFC set to  0.000000
8/8/2011	1:49:59 PM	BCl3 MFC set to  0.000000
8/8/2011	1:49:59 PM	PHl3 MFC set to  0.000000
8/8/2011	1:49:59 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:49:59 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:49:59 PM	Tube furnace set to 0
8/8/2011	1:50:01 PM	Helium valve closed
8/8/2011	1:50:01 PM	H2 valve closed
8/8/2011	1:50:01 PM	BCl3 valve closed
8/8/2011	1:50:01 PM	PH3 valve closed
8/8/2011	1:50:01 PM	SiCl4 pre valve closed
8/8/2011	1:50:01 PM	SiCl4 post valve closed
8/8/2011	1:50:01 PM	Main Vac valve closed
8/8/2011	1:50:01 PM	Bypass valve closed
8/8/2011	1:50:01 PM	Bubbler valve closed
8/8/2011	1:50:01 PM	Helium MFC set to  0.000000
8/8/2011	1:50:01 PM	H2 MFC set to  0.000000
8/8/2011	1:50:01 PM	BCl3 MFC set to  0.000000
8/8/2011	1:50:01 PM	PHl3 MFC set to  0.000000
8/8/2011	1:50:01 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:50:01 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:50:01 PM	Tube furnace set to 0
8/8/2011	1:50:02 PM	Run finished at 1:50 PM
8/8/2011	1:50:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	1:52:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	1:52:04 PM	Recipe started at 1:52 PM
8/8/2011	1:52:04 PM	Helium valve closed
8/8/2011	1:52:04 PM	H2 valve closed
8/8/2011	1:52:04 PM	BCl3 valve closed
8/8/2011	1:52:04 PM	PH3 valve closed
8/8/2011	1:52:04 PM	SiCl4 pre valve closed
8/8/2011	1:52:04 PM	SiCl4 post valve closed
8/8/2011	1:52:04 PM	Main Vac valve closed
8/8/2011	1:52:04 PM	Bubbler valve closed
8/8/2011	1:52:04 PM	Bypass valve opened
8/8/2011	1:52:04 PM	Helium MFC set to  0.000000
8/8/2011	1:52:04 PM	H2 MFC set to  0.000000
8/8/2011	1:52:04 PM	BCl3 MFC set to  0.000000
8/8/2011	1:52:04 PM	PHl3 MFC set to  0.000000
8/8/2011	1:52:04 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:52:04 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:52:04 PM	Tube furnace set to 0
8/8/2011	1:53:05 PM	Helium valve closed
8/8/2011	1:53:05 PM	H2 valve closed
8/8/2011	1:53:05 PM	BCl3 valve closed
8/8/2011	1:53:05 PM	PH3 valve closed
8/8/2011	1:53:05 PM	SiCl4 pre valve closed
8/8/2011	1:53:05 PM	SiCl4 post valve closed
8/8/2011	1:53:05 PM	Main Vac valve closed
8/8/2011	1:53:05 PM	Bubbler valve closed
8/8/2011	1:53:05 PM	Bypass valve opened
8/8/2011	1:53:05 PM	Helium MFC set to  0.000000
8/8/2011	1:53:05 PM	H2 MFC set to  0.000000
8/8/2011	1:53:05 PM	BCl3 MFC set to  0.000000
8/8/2011	1:53:05 PM	PHl3 MFC set to  0.000000
8/8/2011	1:53:05 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:53:05 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:53:06 PM	Tube furnace set to 0
8/8/2011	1:54:06 PM	Helium valve closed
8/8/2011	1:54:06 PM	H2 valve closed
8/8/2011	1:54:06 PM	BCl3 valve closed
8/8/2011	1:54:06 PM	PH3 valve closed
8/8/2011	1:54:06 PM	SiCl4 pre valve closed
8/8/2011	1:54:06 PM	SiCl4 post valve closed
8/8/2011	1:54:06 PM	Bypass valve closed
8/8/2011	1:54:06 PM	Bubbler valve closed
8/8/2011	1:54:06 PM	Main Vac valve opened
8/8/2011	1:54:06 PM	Helium MFC set to  0.000000
8/8/2011	1:54:06 PM	H2 MFC set to  0.000000
8/8/2011	1:54:06 PM	BCl3 MFC set to  0.000000
8/8/2011	1:54:06 PM	PHl3 MFC set to  0.000000
8/8/2011	1:54:06 PM	SiCl4 MFC set to  0.000000
8/8/2011	1:54:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	1:54:06 PM	Tube furnace set to 0
8/8/2011	1:54:07 PM	Run finished at 1:54 PM
8/8/2011	1:54:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	2:10:42 PM	Helium MFC set to  20.000000
8/8/2011	2:10:43 PM	Helium valve opened
8/8/2011	2:12:10 PM	Helium valve closed
8/8/2011	2:12:35 PM	Main Vac valve closed
8/8/2011	2:12:41 PM	Main Vac valve opened
8/8/2011	2:13:59 PM	Recipe started at 2:13 PM
8/8/2011	2:13:59 PM	Helium valve closed
8/8/2011	2:13:59 PM	H2 valve closed
8/8/2011	2:13:59 PM	BCl3 valve closed
8/8/2011	2:13:59 PM	PH3 valve closed
8/8/2011	2:13:59 PM	SiCl4 pre valve closed
8/8/2011	2:13:59 PM	SiCl4 post valve closed
8/8/2011	2:13:59 PM	Main Vac valve closed
8/8/2011	2:13:59 PM	Bypass valve closed
8/8/2011	2:13:59 PM	Bubbler valve closed
8/8/2011	2:13:59 PM	Helium MFC set to  0.000000
8/8/2011	2:13:59 PM	H2 MFC set to  0.000000
8/8/2011	2:13:59 PM	BCl3 MFC set to  0.000000
8/8/2011	2:13:59 PM	PHl3 MFC set to  0.000000
8/8/2011	2:13:59 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:13:59 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:13:59 PM	Tube furnace set to 0
8/8/2011	2:14:02 PM	Helium valve closed
8/8/2011	2:14:02 PM	BCl3 valve closed
8/8/2011	2:14:02 PM	PH3 valve closed
8/8/2011	2:14:02 PM	SiCl4 pre valve closed
8/8/2011	2:14:02 PM	SiCl4 post valve closed
8/8/2011	2:14:02 PM	Main Vac valve closed
8/8/2011	2:14:02 PM	Bypass valve closed
8/8/2011	2:14:02 PM	Bubbler valve closed
8/8/2011	2:14:02 PM	H2 valve opened
8/8/2011	2:14:02 PM	Helium MFC set to  0.000000
8/8/2011	2:14:02 PM	H2 MFC set to  500.000000
8/8/2011	2:14:02 PM	BCl3 MFC set to  0.000000
8/8/2011	2:14:02 PM	PHl3 MFC set to  0.000000
8/8/2011	2:14:02 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:14:02 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:14:02 PM	Tube furnace set to 0
8/8/2011	2:14:44 PM	Run aborted at 2:14 PM
8/8/2011	2:14:44 PM	Helium valve closed
8/8/2011	2:14:44 PM	H2 valve closed
8/8/2011	2:14:44 PM	BCl3 valve closed
8/8/2011	2:14:44 PM	PH3 valve closed
8/8/2011	2:14:44 PM	SiCl4 pre valve closed
8/8/2011	2:14:44 PM	SiCl4 post valve closed
8/8/2011	2:14:44 PM	Bypass valve closed
8/8/2011	2:14:44 PM	Main Vac valve closed
8/8/2011	2:14:44 PM	Bubbler valve closed
8/8/2011	2:14:44 PM	Helium MFC set to  0.000000
8/8/2011	2:14:44 PM	H2 MFC set to  0.000000
8/8/2011	2:14:44 PM	BCl3 MFC set to  0.000000
8/8/2011	2:14:44 PM	PHl3 MFC set to  0.000000
8/8/2011	2:14:44 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:14:44 PM	Tube furnace set to 0
8/8/2011	2:15:04 PM	Recipe started at 2:15 PM
8/8/2011	2:15:04 PM	Helium valve closed
8/8/2011	2:15:04 PM	H2 valve closed
8/8/2011	2:15:04 PM	BCl3 valve closed
8/8/2011	2:15:04 PM	PH3 valve closed
8/8/2011	2:15:04 PM	SiCl4 pre valve closed
8/8/2011	2:15:04 PM	SiCl4 post valve closed
8/8/2011	2:15:04 PM	Main Vac valve closed
8/8/2011	2:15:04 PM	Bypass valve closed
8/8/2011	2:15:04 PM	Bubbler valve closed
8/8/2011	2:15:04 PM	Helium MFC set to  0.000000
8/8/2011	2:15:04 PM	H2 MFC set to  0.000000
8/8/2011	2:15:04 PM	BCl3 MFC set to  0.000000
8/8/2011	2:15:04 PM	PHl3 MFC set to  0.000000
8/8/2011	2:15:04 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:15:04 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:15:04 PM	Tube furnace set to 0
8/8/2011	2:15:07 PM	Helium valve closed
8/8/2011	2:15:07 PM	BCl3 valve closed
8/8/2011	2:15:07 PM	PH3 valve closed
8/8/2011	2:15:07 PM	SiCl4 pre valve closed
8/8/2011	2:15:07 PM	SiCl4 post valve closed
8/8/2011	2:15:07 PM	Main Vac valve closed
8/8/2011	2:15:07 PM	Bypass valve closed
8/8/2011	2:15:07 PM	Bubbler valve closed
8/8/2011	2:15:07 PM	H2 valve opened
8/8/2011	2:15:07 PM	Helium MFC set to  0.000000
8/8/2011	2:15:07 PM	H2 MFC set to  500.000000
8/8/2011	2:15:07 PM	BCl3 MFC set to  0.000000
8/8/2011	2:15:07 PM	PHl3 MFC set to  0.000000
8/8/2011	2:15:07 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:15:07 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:15:07 PM	Tube furnace set to 0
8/8/2011	2:15:32 PM	Helium valve closed
8/8/2011	2:15:32 PM	BCl3 valve closed
8/8/2011	2:15:32 PM	PH3 valve closed
8/8/2011	2:15:32 PM	SiCl4 pre valve closed
8/8/2011	2:15:32 PM	SiCl4 post valve closed
8/8/2011	2:15:32 PM	Main Vac valve closed
8/8/2011	2:15:32 PM	Bypass valve closed
8/8/2011	2:15:32 PM	H2 valve opened
8/8/2011	2:15:32 PM	Bubbler valve opened
8/8/2011	2:15:32 PM	Helium MFC set to  0.000000
8/8/2011	2:15:32 PM	H2 MFC set to  500.000000
8/8/2011	2:15:32 PM	BCl3 MFC set to  0.000000
8/8/2011	2:15:32 PM	PHl3 MFC set to  0.000000
8/8/2011	2:15:32 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:15:32 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:15:33 PM	Tube furnace set to 0
8/8/2011	2:15:34 PM	Helium valve closed
8/8/2011	2:15:34 PM	BCl3 valve closed
8/8/2011	2:15:34 PM	PH3 valve closed
8/8/2011	2:15:34 PM	SiCl4 pre valve closed
8/8/2011	2:15:34 PM	SiCl4 post valve closed
8/8/2011	2:15:34 PM	Main Vac valve closed
8/8/2011	2:15:34 PM	Bypass valve closed
8/8/2011	2:15:34 PM	H2 valve opened
8/8/2011	2:15:34 PM	Bubbler valve opened
8/8/2011	2:15:34 PM	Helium MFC set to  0.000000
8/8/2011	2:15:34 PM	H2 MFC set to  500.000000
8/8/2011	2:15:34 PM	BCl3 MFC set to  0.000000
8/8/2011	2:15:34 PM	PHl3 MFC set to  0.000000
8/8/2011	2:15:34 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:15:34 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:15:34 PM	Tube furnace set to 1000
8/8/2011	2:36:34 PM	Helium valve closed
8/8/2011	2:36:34 PM	PH3 valve closed
8/8/2011	2:36:34 PM	Main Vac valve closed
8/8/2011	2:36:34 PM	Bypass valve closed
8/8/2011	2:36:34 PM	H2 valve opened
8/8/2011	2:36:34 PM	BCl3 valve opened
8/8/2011	2:36:34 PM	SiCl4 pre valve opened
8/8/2011	2:36:34 PM	SiCl4 post valve opened
8/8/2011	2:36:34 PM	Bubbler valve opened
8/8/2011	2:36:34 PM	Helium MFC set to  0.000000
8/8/2011	2:36:34 PM	H2 MFC set to  500.000000
8/8/2011	2:36:34 PM	BCl3 MFC set to  2.000000
8/8/2011	2:36:34 PM	PHl3 MFC set to  0.000000
8/8/2011	2:36:34 PM	SiCl4 MFC set to  50.000000
8/8/2011	2:36:34 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:36:34 PM	Tube furnace set to 1000
8/8/2011	2:53:34 PM	Helium valve closed
8/8/2011	2:53:34 PM	BCl3 valve closed
8/8/2011	2:53:34 PM	PH3 valve closed
8/8/2011	2:53:34 PM	SiCl4 pre valve closed
8/8/2011	2:53:34 PM	SiCl4 post valve closed
8/8/2011	2:53:34 PM	Main Vac valve closed
8/8/2011	2:53:34 PM	Bypass valve closed
8/8/2011	2:53:34 PM	H2 valve opened
8/8/2011	2:53:34 PM	Bubbler valve opened
8/8/2011	2:53:34 PM	Helium MFC set to  0.000000
8/8/2011	2:53:34 PM	H2 MFC set to  500.000000
8/8/2011	2:53:34 PM	BCl3 MFC set to  0.000000
8/8/2011	2:53:34 PM	PHl3 MFC set to  0.000000
8/8/2011	2:53:34 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:53:34 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:53:34 PM	Tube furnace set to 750
8/8/2011	2:58:34 PM	H2 valve closed
8/8/2011	2:58:34 PM	BCl3 valve closed
8/8/2011	2:58:34 PM	PH3 valve closed
8/8/2011	2:58:34 PM	SiCl4 pre valve closed
8/8/2011	2:58:34 PM	SiCl4 post valve closed
8/8/2011	2:58:34 PM	Main Vac valve closed
8/8/2011	2:58:34 PM	Bypass valve closed
8/8/2011	2:58:34 PM	Helium valve opened
8/8/2011	2:58:34 PM	Bubbler valve opened
8/8/2011	2:58:34 PM	Helium MFC set to  400.000000
8/8/2011	2:58:34 PM	H2 MFC set to  0.000000
8/8/2011	2:58:34 PM	BCl3 MFC set to  0.000000
8/8/2011	2:58:34 PM	PHl3 MFC set to  0.000000
8/8/2011	2:58:34 PM	SiCl4 MFC set to  0.000000
8/8/2011	2:58:34 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	2:58:34 PM	Tube furnace set to 0
8/8/2011	3:18:34 PM	Helium valve closed
8/8/2011	3:18:34 PM	H2 valve closed
8/8/2011	3:18:34 PM	BCl3 valve closed
8/8/2011	3:18:34 PM	PH3 valve closed
8/8/2011	3:18:34 PM	SiCl4 pre valve closed
8/8/2011	3:18:34 PM	SiCl4 post valve closed
8/8/2011	3:18:34 PM	Main Vac valve closed
8/8/2011	3:18:34 PM	Bypass valve closed
8/8/2011	3:18:34 PM	Bubbler valve closed
8/8/2011	3:18:34 PM	Helium MFC set to  0.000000
8/8/2011	3:18:34 PM	H2 MFC set to  0.000000
8/8/2011	3:18:34 PM	BCl3 MFC set to  0.000000
8/8/2011	3:18:34 PM	PHl3 MFC set to  0.000000
8/8/2011	3:18:34 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:18:34 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:18:34 PM	Tube furnace set to 0
8/8/2011	3:18:35 PM	Run finished at 3:18 PM
8/8/2011	3:22:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	3:22:39 PM	Recipe started at 3:22 PM
8/8/2011	3:22:39 PM	Helium valve closed
8/8/2011	3:22:39 PM	H2 valve closed
8/8/2011	3:22:39 PM	BCl3 valve closed
8/8/2011	3:22:39 PM	PH3 valve closed
8/8/2011	3:22:39 PM	SiCl4 pre valve closed
8/8/2011	3:22:39 PM	SiCl4 post valve closed
8/8/2011	3:22:39 PM	Main Vac valve closed
8/8/2011	3:22:39 PM	Bypass valve closed
8/8/2011	3:22:39 PM	Bubbler valve closed
8/8/2011	3:22:39 PM	Helium MFC set to  0.000000
8/8/2011	3:22:39 PM	H2 MFC set to  0.000000
8/8/2011	3:22:39 PM	BCl3 MFC set to  0.000000
8/8/2011	3:22:39 PM	PHl3 MFC set to  0.000000
8/8/2011	3:22:39 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:22:39 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:22:39 PM	Tube furnace set to 0
8/8/2011	3:22:42 PM	H2 valve closed
8/8/2011	3:22:42 PM	BCl3 valve closed
8/8/2011	3:22:42 PM	PH3 valve closed
8/8/2011	3:22:42 PM	SiCl4 pre valve closed
8/8/2011	3:22:42 PM	SiCl4 post valve closed
8/8/2011	3:22:42 PM	Main Vac valve closed
8/8/2011	3:22:42 PM	Bypass valve closed
8/8/2011	3:22:42 PM	Bubbler valve closed
8/8/2011	3:22:42 PM	Helium valve opened
8/8/2011	3:22:42 PM	Helium MFC set to  500.000000
8/8/2011	3:22:42 PM	H2 MFC set to  0.000000
8/8/2011	3:22:42 PM	BCl3 MFC set to  0.000000
8/8/2011	3:22:42 PM	PHl3 MFC set to  0.000000
8/8/2011	3:22:42 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:22:42 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:22:42 PM	Tube furnace set to 0
8/8/2011	3:22:43 PM	Helium valve closed
8/8/2011	3:22:43 PM	H2 valve closed
8/8/2011	3:22:43 PM	BCl3 valve closed
8/8/2011	3:22:43 PM	PH3 valve closed
8/8/2011	3:22:43 PM	SiCl4 pre valve closed
8/8/2011	3:22:43 PM	SiCl4 post valve closed
8/8/2011	3:22:43 PM	Main Vac valve closed
8/8/2011	3:22:43 PM	Bypass valve closed
8/8/2011	3:22:43 PM	Bubbler valve closed
8/8/2011	3:22:43 PM	Helium MFC set to  0.000000
8/8/2011	3:22:43 PM	H2 MFC set to  0.000000
8/8/2011	3:22:43 PM	BCl3 MFC set to  0.000000
8/8/2011	3:22:43 PM	PHl3 MFC set to  0.000000
8/8/2011	3:22:43 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:22:43 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:22:43 PM	Tube furnace set to 0
8/8/2011	3:22:44 PM	Run finished at 3:22 PM
8/8/2011	3:22:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	3:54:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	3:54:51 PM	Recipe started at 3:54 PM
8/8/2011	3:54:51 PM	Helium valve closed
8/8/2011	3:54:51 PM	H2 valve closed
8/8/2011	3:54:51 PM	BCl3 valve closed
8/8/2011	3:54:51 PM	PH3 valve closed
8/8/2011	3:54:51 PM	SiCl4 pre valve closed
8/8/2011	3:54:51 PM	SiCl4 post valve closed
8/8/2011	3:54:51 PM	Main Vac valve closed
8/8/2011	3:54:51 PM	Bypass valve closed
8/8/2011	3:54:51 PM	Bubbler valve closed
8/8/2011	3:54:51 PM	Helium MFC set to  0.000000
8/8/2011	3:54:51 PM	H2 MFC set to  0.000000
8/8/2011	3:54:51 PM	BCl3 MFC set to  0.000000
8/8/2011	3:54:51 PM	PHl3 MFC set to  0.000000
8/8/2011	3:54:51 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:54:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:54:51 PM	Tube furnace set to 0
8/8/2011	3:54:54 PM	H2 valve closed
8/8/2011	3:54:54 PM	BCl3 valve closed
8/8/2011	3:54:54 PM	PH3 valve closed
8/8/2011	3:54:54 PM	SiCl4 pre valve closed
8/8/2011	3:54:54 PM	SiCl4 post valve closed
8/8/2011	3:54:54 PM	Main Vac valve closed
8/8/2011	3:54:54 PM	Bypass valve closed
8/8/2011	3:54:54 PM	Bubbler valve closed
8/8/2011	3:54:54 PM	Helium valve opened
8/8/2011	3:54:54 PM	Helium MFC set to  500.000000
8/8/2011	3:54:54 PM	H2 MFC set to  0.000000
8/8/2011	3:54:54 PM	BCl3 MFC set to  0.000000
8/8/2011	3:54:54 PM	PHl3 MFC set to  0.000000
8/8/2011	3:54:54 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:54:55 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:54:55 PM	Tube furnace set to 0
8/8/2011	3:55:02 PM	Helium valve closed
8/8/2011	3:55:02 PM	H2 valve closed
8/8/2011	3:55:02 PM	BCl3 valve closed
8/8/2011	3:55:02 PM	PH3 valve closed
8/8/2011	3:55:02 PM	SiCl4 pre valve closed
8/8/2011	3:55:02 PM	SiCl4 post valve closed
8/8/2011	3:55:02 PM	Main Vac valve closed
8/8/2011	3:55:02 PM	Bypass valve closed
8/8/2011	3:55:02 PM	Bubbler valve closed
8/8/2011	3:55:02 PM	Helium MFC set to  0.000000
8/8/2011	3:55:02 PM	H2 MFC set to  0.000000
8/8/2011	3:55:02 PM	BCl3 MFC set to  0.000000
8/8/2011	3:55:02 PM	PHl3 MFC set to  0.000000
8/8/2011	3:55:02 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:55:02 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:55:02 PM	Tube furnace set to 0
8/8/2011	3:55:03 PM	Run finished at 3:55 PM
8/8/2011	3:55:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	3:59:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	3:59:39 PM	Recipe started at 3:59 PM
8/8/2011	3:59:39 PM	Helium valve closed
8/8/2011	3:59:39 PM	H2 valve closed
8/8/2011	3:59:39 PM	BCl3 valve closed
8/8/2011	3:59:39 PM	PH3 valve closed
8/8/2011	3:59:39 PM	SiCl4 pre valve closed
8/8/2011	3:59:39 PM	SiCl4 post valve closed
8/8/2011	3:59:39 PM	Main Vac valve closed
8/8/2011	3:59:39 PM	Bubbler valve closed
8/8/2011	3:59:39 PM	Bypass valve opened
8/8/2011	3:59:39 PM	Helium MFC set to  0.000000
8/8/2011	3:59:39 PM	H2 MFC set to  0.000000
8/8/2011	3:59:39 PM	BCl3 MFC set to  0.000000
8/8/2011	3:59:39 PM	PHl3 MFC set to  0.000000
8/8/2011	3:59:39 PM	SiCl4 MFC set to  0.000000
8/8/2011	3:59:39 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	3:59:39 PM	Tube furnace set to 0
8/8/2011	4:00:49 PM	Helium valve closed
8/8/2011	4:00:49 PM	H2 valve closed
8/8/2011	4:00:49 PM	BCl3 valve closed
8/8/2011	4:00:49 PM	PH3 valve closed
8/8/2011	4:00:49 PM	SiCl4 pre valve closed
8/8/2011	4:00:49 PM	SiCl4 post valve closed
8/8/2011	4:00:49 PM	Main Vac valve closed
8/8/2011	4:00:49 PM	Bubbler valve closed
8/8/2011	4:00:49 PM	Bypass valve opened
8/8/2011	4:00:49 PM	Helium MFC set to  0.000000
8/8/2011	4:00:49 PM	H2 MFC set to  0.000000
8/8/2011	4:00:49 PM	BCl3 MFC set to  0.000000
8/8/2011	4:00:49 PM	PHl3 MFC set to  0.000000
8/8/2011	4:00:49 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:00:49 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:00:49 PM	Tube furnace set to 0
8/8/2011	4:01:49 PM	Helium valve closed
8/8/2011	4:01:49 PM	H2 valve closed
8/8/2011	4:01:49 PM	BCl3 valve closed
8/8/2011	4:01:49 PM	PH3 valve closed
8/8/2011	4:01:49 PM	SiCl4 pre valve closed
8/8/2011	4:01:49 PM	SiCl4 post valve closed
8/8/2011	4:01:49 PM	Bypass valve closed
8/8/2011	4:01:49 PM	Bubbler valve closed
8/8/2011	4:01:49 PM	Main Vac valve opened
8/8/2011	4:01:49 PM	Helium MFC set to  0.000000
8/8/2011	4:01:49 PM	H2 MFC set to  0.000000
8/8/2011	4:01:49 PM	BCl3 MFC set to  0.000000
8/8/2011	4:01:49 PM	PHl3 MFC set to  0.000000
8/8/2011	4:01:49 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:01:49 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:01:49 PM	Tube furnace set to 0
8/8/2011	4:01:50 PM	Run finished at 4:01 PM
8/8/2011	4:01:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	4:07:47 PM	Helium MFC set to  20.000000
8/8/2011	4:07:48 PM	Helium valve opened
8/8/2011	4:10:07 PM	Helium valve closed
8/8/2011	4:10:31 PM	Helium valve opened
8/8/2011	4:11:18 PM	Helium valve closed
8/8/2011	4:11:21 PM	Helium MFC set to  0.000000
8/8/2011	4:24:07 PM	Helium MFC set to  20.000000
8/8/2011	4:24:11 PM	Helium valve opened
8/8/2011	4:24:15 PM	Helium valve closed
8/8/2011	4:24:18 PM	Helium MFC set to  0.000000
8/8/2011	4:24:37 PM	Main Vac valve closed
8/8/2011	4:24:55 PM	Main Vac valve opened
8/8/2011	4:26:01 PM	Recipe started at 4:26 PM
8/8/2011	4:26:01 PM	Helium valve closed
8/8/2011	4:26:01 PM	H2 valve closed
8/8/2011	4:26:01 PM	BCl3 valve closed
8/8/2011	4:26:01 PM	PH3 valve closed
8/8/2011	4:26:01 PM	SiCl4 pre valve closed
8/8/2011	4:26:01 PM	SiCl4 post valve closed
8/8/2011	4:26:01 PM	Main Vac valve closed
8/8/2011	4:26:01 PM	Bypass valve closed
8/8/2011	4:26:01 PM	Bubbler valve closed
8/8/2011	4:26:01 PM	Helium MFC set to  0.000000
8/8/2011	4:26:01 PM	H2 MFC set to  0.000000
8/8/2011	4:26:01 PM	BCl3 MFC set to  0.000000
8/8/2011	4:26:01 PM	PHl3 MFC set to  0.000000
8/8/2011	4:26:01 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:26:01 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:26:02 PM	Tube furnace set to 0
8/8/2011	4:26:05 PM	Helium valve closed
8/8/2011	4:26:05 PM	BCl3 valve closed
8/8/2011	4:26:05 PM	PH3 valve closed
8/8/2011	4:26:05 PM	SiCl4 pre valve closed
8/8/2011	4:26:05 PM	SiCl4 post valve closed
8/8/2011	4:26:05 PM	Main Vac valve closed
8/8/2011	4:26:05 PM	Bypass valve closed
8/8/2011	4:26:05 PM	Bubbler valve closed
8/8/2011	4:26:05 PM	H2 valve opened
8/8/2011	4:26:05 PM	Helium MFC set to  0.000000
8/8/2011	4:26:05 PM	H2 MFC set to  500.000000
8/8/2011	4:26:05 PM	BCl3 MFC set to  0.000000
8/8/2011	4:26:05 PM	PHl3 MFC set to  0.000000
8/8/2011	4:26:05 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:26:05 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:26:05 PM	Tube furnace set to 0
8/8/2011	4:27:11 PM	Helium valve closed
8/8/2011	4:27:11 PM	BCl3 valve closed
8/8/2011	4:27:11 PM	PH3 valve closed
8/8/2011	4:27:11 PM	SiCl4 pre valve closed
8/8/2011	4:27:11 PM	SiCl4 post valve closed
8/8/2011	4:27:11 PM	Main Vac valve closed
8/8/2011	4:27:11 PM	Bypass valve closed
8/8/2011	4:27:11 PM	H2 valve opened
8/8/2011	4:27:11 PM	Bubbler valve opened
8/8/2011	4:27:11 PM	Helium MFC set to  0.000000
8/8/2011	4:27:11 PM	H2 MFC set to  500.000000
8/8/2011	4:27:11 PM	BCl3 MFC set to  0.000000
8/8/2011	4:27:11 PM	PHl3 MFC set to  0.000000
8/8/2011	4:27:11 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:27:11 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:27:11 PM	Tube furnace set to 0
8/8/2011	4:27:12 PM	Helium valve closed
8/8/2011	4:27:12 PM	BCl3 valve closed
8/8/2011	4:27:12 PM	PH3 valve closed
8/8/2011	4:27:12 PM	SiCl4 pre valve closed
8/8/2011	4:27:12 PM	SiCl4 post valve closed
8/8/2011	4:27:12 PM	Main Vac valve closed
8/8/2011	4:27:12 PM	Bypass valve closed
8/8/2011	4:27:12 PM	H2 valve opened
8/8/2011	4:27:12 PM	Bubbler valve opened
8/8/2011	4:27:12 PM	Helium MFC set to  0.000000
8/8/2011	4:27:12 PM	H2 MFC set to  500.000000
8/8/2011	4:27:12 PM	BCl3 MFC set to  0.000000
8/8/2011	4:27:12 PM	PHl3 MFC set to  0.000000
8/8/2011	4:27:12 PM	SiCl4 MFC set to  0.000000
8/8/2011	4:27:12 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:27:12 PM	Tube furnace set to 1000
8/8/2011	4:49:12 PM	Helium valve closed
8/8/2011	4:49:12 PM	PH3 valve closed
8/8/2011	4:49:12 PM	Main Vac valve closed
8/8/2011	4:49:12 PM	Bypass valve closed
8/8/2011	4:49:12 PM	H2 valve opened
8/8/2011	4:49:12 PM	BCl3 valve opened
8/8/2011	4:49:12 PM	SiCl4 pre valve opened
8/8/2011	4:49:12 PM	SiCl4 post valve opened
8/8/2011	4:49:12 PM	Bubbler valve opened
8/8/2011	4:49:12 PM	Helium MFC set to  0.000000
8/8/2011	4:49:12 PM	H2 MFC set to  500.000000
8/8/2011	4:49:12 PM	BCl3 MFC set to  2.000000
8/8/2011	4:49:12 PM	PHl3 MFC set to  0.000000
8/8/2011	4:49:12 PM	SiCl4 MFC set to  50.000000
8/8/2011	4:49:12 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	4:49:13 PM	Tube furnace set to 1000
8/8/2011	5:06:13 PM	Helium valve closed
8/8/2011	5:06:13 PM	BCl3 valve closed
8/8/2011	5:06:13 PM	PH3 valve closed
8/8/2011	5:06:13 PM	SiCl4 pre valve closed
8/8/2011	5:06:13 PM	SiCl4 post valve closed
8/8/2011	5:06:13 PM	Main Vac valve closed
8/8/2011	5:06:13 PM	Bypass valve closed
8/8/2011	5:06:13 PM	H2 valve opened
8/8/2011	5:06:13 PM	Bubbler valve opened
8/8/2011	5:06:13 PM	Helium MFC set to  0.000000
8/8/2011	5:06:13 PM	H2 MFC set to  500.000000
8/8/2011	5:06:13 PM	BCl3 MFC set to  0.000000
8/8/2011	5:06:13 PM	PHl3 MFC set to  0.000000
8/8/2011	5:06:13 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:06:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:06:13 PM	Tube furnace set to 750
8/8/2011	5:11:13 PM	H2 valve closed
8/8/2011	5:11:13 PM	BCl3 valve closed
8/8/2011	5:11:13 PM	PH3 valve closed
8/8/2011	5:11:13 PM	SiCl4 pre valve closed
8/8/2011	5:11:13 PM	SiCl4 post valve closed
8/8/2011	5:11:13 PM	Main Vac valve closed
8/8/2011	5:11:13 PM	Bypass valve closed
8/8/2011	5:11:13 PM	Helium valve opened
8/8/2011	5:11:13 PM	Bubbler valve opened
8/8/2011	5:11:13 PM	Helium MFC set to  400.000000
8/8/2011	5:11:13 PM	H2 MFC set to  0.000000
8/8/2011	5:11:13 PM	BCl3 MFC set to  0.000000
8/8/2011	5:11:13 PM	PHl3 MFC set to  0.000000
8/8/2011	5:11:13 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:11:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:11:13 PM	Tube furnace set to 0
8/8/2011	5:31:13 PM	Helium valve closed
8/8/2011	5:31:13 PM	H2 valve closed
8/8/2011	5:31:13 PM	BCl3 valve closed
8/8/2011	5:31:13 PM	PH3 valve closed
8/8/2011	5:31:13 PM	SiCl4 pre valve closed
8/8/2011	5:31:13 PM	SiCl4 post valve closed
8/8/2011	5:31:13 PM	Main Vac valve closed
8/8/2011	5:31:13 PM	Bypass valve closed
8/8/2011	5:31:13 PM	Bubbler valve closed
8/8/2011	5:31:13 PM	Helium MFC set to  0.000000
8/8/2011	5:31:13 PM	H2 MFC set to  0.000000
8/8/2011	5:31:13 PM	BCl3 MFC set to  0.000000
8/8/2011	5:31:13 PM	PHl3 MFC set to  0.000000
8/8/2011	5:31:13 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:31:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:31:13 PM	Tube furnace set to 0
8/8/2011	5:31:14 PM	Run finished at 5:31 PM
8/8/2011	5:59:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	5:59:06 PM	Recipe started at 5:59 PM
8/8/2011	5:59:06 PM	Helium valve closed
8/8/2011	5:59:06 PM	H2 valve closed
8/8/2011	5:59:06 PM	BCl3 valve closed
8/8/2011	5:59:06 PM	PH3 valve closed
8/8/2011	5:59:06 PM	SiCl4 pre valve closed
8/8/2011	5:59:06 PM	SiCl4 post valve closed
8/8/2011	5:59:06 PM	Main Vac valve closed
8/8/2011	5:59:06 PM	Bypass valve closed
8/8/2011	5:59:06 PM	Bubbler valve closed
8/8/2011	5:59:06 PM	Helium MFC set to  0.000000
8/8/2011	5:59:06 PM	H2 MFC set to  0.000000
8/8/2011	5:59:06 PM	BCl3 MFC set to  0.000000
8/8/2011	5:59:06 PM	PHl3 MFC set to  0.000000
8/8/2011	5:59:06 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:59:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:59:06 PM	Tube furnace set to 0
8/8/2011	5:59:09 PM	H2 valve closed
8/8/2011	5:59:09 PM	BCl3 valve closed
8/8/2011	5:59:09 PM	PH3 valve closed
8/8/2011	5:59:09 PM	SiCl4 pre valve closed
8/8/2011	5:59:09 PM	SiCl4 post valve closed
8/8/2011	5:59:09 PM	Main Vac valve closed
8/8/2011	5:59:09 PM	Bypass valve closed
8/8/2011	5:59:09 PM	Bubbler valve closed
8/8/2011	5:59:09 PM	Helium valve opened
8/8/2011	5:59:09 PM	Helium MFC set to  500.000000
8/8/2011	5:59:09 PM	H2 MFC set to  0.000000
8/8/2011	5:59:09 PM	BCl3 MFC set to  0.000000
8/8/2011	5:59:09 PM	PHl3 MFC set to  0.000000
8/8/2011	5:59:09 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:59:09 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:59:09 PM	Tube furnace set to 0
8/8/2011	5:59:15 PM	Helium valve closed
8/8/2011	5:59:15 PM	H2 valve closed
8/8/2011	5:59:15 PM	BCl3 valve closed
8/8/2011	5:59:15 PM	PH3 valve closed
8/8/2011	5:59:15 PM	SiCl4 pre valve closed
8/8/2011	5:59:15 PM	SiCl4 post valve closed
8/8/2011	5:59:15 PM	Main Vac valve closed
8/8/2011	5:59:15 PM	Bypass valve closed
8/8/2011	5:59:15 PM	Bubbler valve closed
8/8/2011	5:59:15 PM	Helium MFC set to  0.000000
8/8/2011	5:59:15 PM	H2 MFC set to  0.000000
8/8/2011	5:59:15 PM	BCl3 MFC set to  0.000000
8/8/2011	5:59:15 PM	PHl3 MFC set to  0.000000
8/8/2011	5:59:15 PM	SiCl4 MFC set to  0.000000
8/8/2011	5:59:15 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	5:59:15 PM	Tube furnace set to 0
8/8/2011	5:59:16 PM	Run finished at 5:59 PM
8/8/2011	5:59:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	6:03:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	6:03:14 PM	Recipe started at 6:03 PM
8/8/2011	6:03:14 PM	Helium valve closed
8/8/2011	6:03:14 PM	H2 valve closed
8/8/2011	6:03:14 PM	BCl3 valve closed
8/8/2011	6:03:14 PM	PH3 valve closed
8/8/2011	6:03:14 PM	SiCl4 pre valve closed
8/8/2011	6:03:14 PM	SiCl4 post valve closed
8/8/2011	6:03:14 PM	Main Vac valve closed
8/8/2011	6:03:14 PM	Bubbler valve closed
8/8/2011	6:03:14 PM	Bypass valve opened
8/8/2011	6:03:14 PM	Helium MFC set to  0.000000
8/8/2011	6:03:14 PM	H2 MFC set to  0.000000
8/8/2011	6:03:14 PM	BCl3 MFC set to  0.000000
8/8/2011	6:03:14 PM	PHl3 MFC set to  0.000000
8/8/2011	6:03:14 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:03:14 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:03:14 PM	Tube furnace set to 0
8/8/2011	6:04:20 PM	Helium valve closed
8/8/2011	6:04:20 PM	H2 valve closed
8/8/2011	6:04:20 PM	BCl3 valve closed
8/8/2011	6:04:20 PM	PH3 valve closed
8/8/2011	6:04:20 PM	SiCl4 pre valve closed
8/8/2011	6:04:20 PM	SiCl4 post valve closed
8/8/2011	6:04:20 PM	Main Vac valve closed
8/8/2011	6:04:20 PM	Bubbler valve closed
8/8/2011	6:04:20 PM	Bypass valve opened
8/8/2011	6:04:20 PM	Helium MFC set to  0.000000
8/8/2011	6:04:20 PM	H2 MFC set to  0.000000
8/8/2011	6:04:20 PM	BCl3 MFC set to  0.000000
8/8/2011	6:04:20 PM	PHl3 MFC set to  0.000000
8/8/2011	6:04:20 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:04:20 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:04:20 PM	Tube furnace set to 0
8/8/2011	6:05:20 PM	Helium valve closed
8/8/2011	6:05:20 PM	H2 valve closed
8/8/2011	6:05:20 PM	BCl3 valve closed
8/8/2011	6:05:20 PM	PH3 valve closed
8/8/2011	6:05:20 PM	SiCl4 pre valve closed
8/8/2011	6:05:20 PM	SiCl4 post valve closed
8/8/2011	6:05:20 PM	Bypass valve closed
8/8/2011	6:05:20 PM	Bubbler valve closed
8/8/2011	6:05:20 PM	Main Vac valve opened
8/8/2011	6:05:20 PM	Helium MFC set to  0.000000
8/8/2011	6:05:20 PM	H2 MFC set to  0.000000
8/8/2011	6:05:20 PM	BCl3 MFC set to  0.000000
8/8/2011	6:05:20 PM	PHl3 MFC set to  0.000000
8/8/2011	6:05:20 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:05:20 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:05:20 PM	Tube furnace set to 0
8/8/2011	6:05:21 PM	Run finished at 6:05 PM
8/8/2011	6:05:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	6:16:52 PM	Helium MFC set to  20.000000
8/8/2011	6:16:54 PM	Helium valve opened
8/8/2011	6:17:50 PM	Helium valve closed
8/8/2011	6:31:11 PM	Main Vac valve closed
8/8/2011	6:31:24 PM	Main Vac valve opened
8/8/2011	6:31:28 PM	Helium valve opened
8/8/2011	6:31:47 PM	Helium valve closed
8/8/2011	6:31:51 PM	Helium MFC set to  0.000000
8/8/2011	6:33:19 PM	Recipe started at 6:33 PM
8/8/2011	6:33:19 PM	Helium valve closed
8/8/2011	6:33:19 PM	H2 valve closed
8/8/2011	6:33:19 PM	BCl3 valve closed
8/8/2011	6:33:19 PM	PH3 valve closed
8/8/2011	6:33:19 PM	SiCl4 pre valve closed
8/8/2011	6:33:19 PM	SiCl4 post valve closed
8/8/2011	6:33:19 PM	Main Vac valve closed
8/8/2011	6:33:19 PM	Bypass valve closed
8/8/2011	6:33:19 PM	Bubbler valve closed
8/8/2011	6:33:19 PM	Helium MFC set to  0.000000
8/8/2011	6:33:19 PM	H2 MFC set to  0.000000
8/8/2011	6:33:19 PM	BCl3 MFC set to  0.000000
8/8/2011	6:33:19 PM	PHl3 MFC set to  0.000000
8/8/2011	6:33:19 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:33:19 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:33:19 PM	Tube furnace set to 0
8/8/2011	6:33:22 PM	Helium valve closed
8/8/2011	6:33:22 PM	BCl3 valve closed
8/8/2011	6:33:22 PM	PH3 valve closed
8/8/2011	6:33:22 PM	SiCl4 pre valve closed
8/8/2011	6:33:22 PM	SiCl4 post valve closed
8/8/2011	6:33:22 PM	Main Vac valve closed
8/8/2011	6:33:22 PM	Bypass valve closed
8/8/2011	6:33:22 PM	Bubbler valve closed
8/8/2011	6:33:22 PM	H2 valve opened
8/8/2011	6:33:22 PM	Helium MFC set to  0.000000
8/8/2011	6:33:22 PM	H2 MFC set to  500.000000
8/8/2011	6:33:22 PM	BCl3 MFC set to  0.000000
8/8/2011	6:33:22 PM	PHl3 MFC set to  0.000000
8/8/2011	6:33:22 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:33:22 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:33:22 PM	Tube furnace set to 0
8/8/2011	6:34:29 PM	Helium valve closed
8/8/2011	6:34:29 PM	BCl3 valve closed
8/8/2011	6:34:29 PM	PH3 valve closed
8/8/2011	6:34:29 PM	SiCl4 pre valve closed
8/8/2011	6:34:29 PM	SiCl4 post valve closed
8/8/2011	6:34:29 PM	Main Vac valve closed
8/8/2011	6:34:29 PM	Bypass valve closed
8/8/2011	6:34:29 PM	H2 valve opened
8/8/2011	6:34:29 PM	Bubbler valve opened
8/8/2011	6:34:29 PM	Helium MFC set to  0.000000
8/8/2011	6:34:29 PM	H2 MFC set to  500.000000
8/8/2011	6:34:29 PM	BCl3 MFC set to  0.000000
8/8/2011	6:34:29 PM	PHl3 MFC set to  0.000000
8/8/2011	6:34:30 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:34:30 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:34:30 PM	Tube furnace set to 0
8/8/2011	6:34:31 PM	Helium valve closed
8/8/2011	6:34:31 PM	BCl3 valve closed
8/8/2011	6:34:31 PM	PH3 valve closed
8/8/2011	6:34:31 PM	SiCl4 pre valve closed
8/8/2011	6:34:31 PM	SiCl4 post valve closed
8/8/2011	6:34:31 PM	Main Vac valve closed
8/8/2011	6:34:31 PM	Bypass valve closed
8/8/2011	6:34:31 PM	H2 valve opened
8/8/2011	6:34:31 PM	Bubbler valve opened
8/8/2011	6:34:31 PM	Helium MFC set to  0.000000
8/8/2011	6:34:31 PM	H2 MFC set to  500.000000
8/8/2011	6:34:31 PM	BCl3 MFC set to  0.000000
8/8/2011	6:34:31 PM	PHl3 MFC set to  0.000000
8/8/2011	6:34:31 PM	SiCl4 MFC set to  0.000000
8/8/2011	6:34:31 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:34:31 PM	Tube furnace set to 1000
8/8/2011	6:56:31 PM	Helium valve closed
8/8/2011	6:56:31 PM	PH3 valve closed
8/8/2011	6:56:31 PM	Main Vac valve closed
8/8/2011	6:56:31 PM	Bypass valve closed
8/8/2011	6:56:31 PM	H2 valve opened
8/8/2011	6:56:31 PM	BCl3 valve opened
8/8/2011	6:56:31 PM	SiCl4 pre valve opened
8/8/2011	6:56:31 PM	SiCl4 post valve opened
8/8/2011	6:56:31 PM	Bubbler valve opened
8/8/2011	6:56:31 PM	Helium MFC set to  0.000000
8/8/2011	6:56:31 PM	H2 MFC set to  500.000000
8/8/2011	6:56:31 PM	BCl3 MFC set to  2.200000
8/8/2011	6:56:31 PM	PHl3 MFC set to  0.000000
8/8/2011	6:56:31 PM	SiCl4 MFC set to  50.000000
8/8/2011	6:56:31 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	6:56:31 PM	Tube furnace set to 1000
8/8/2011	7:16:31 PM	Helium valve closed
8/8/2011	7:16:31 PM	BCl3 valve closed
8/8/2011	7:16:31 PM	PH3 valve closed
8/8/2011	7:16:31 PM	SiCl4 pre valve closed
8/8/2011	7:16:31 PM	SiCl4 post valve closed
8/8/2011	7:16:31 PM	Main Vac valve closed
8/8/2011	7:16:31 PM	Bypass valve closed
8/8/2011	7:16:31 PM	H2 valve opened
8/8/2011	7:16:31 PM	Bubbler valve opened
8/8/2011	7:16:31 PM	Helium MFC set to  0.000000
8/8/2011	7:16:31 PM	H2 MFC set to  500.000000
8/8/2011	7:16:31 PM	BCl3 MFC set to  0.000000
8/8/2011	7:16:31 PM	PHl3 MFC set to  0.000000
8/8/2011	7:16:31 PM	SiCl4 MFC set to  0.000000
8/8/2011	7:16:31 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	7:16:31 PM	Tube furnace set to 750
8/8/2011	7:21:31 PM	H2 valve closed
8/8/2011	7:21:31 PM	BCl3 valve closed
8/8/2011	7:21:31 PM	PH3 valve closed
8/8/2011	7:21:31 PM	SiCl4 pre valve closed
8/8/2011	7:21:31 PM	SiCl4 post valve closed
8/8/2011	7:21:31 PM	Main Vac valve closed
8/8/2011	7:21:31 PM	Bypass valve closed
8/8/2011	7:21:31 PM	Helium valve opened
8/8/2011	7:21:31 PM	Bubbler valve opened
8/8/2011	7:21:31 PM	Helium MFC set to  400.000000
8/8/2011	7:21:31 PM	H2 MFC set to  0.000000
8/8/2011	7:21:31 PM	BCl3 MFC set to  0.000000
8/8/2011	7:21:31 PM	PHl3 MFC set to  0.000000
8/8/2011	7:21:31 PM	SiCl4 MFC set to  0.000000
8/8/2011	7:21:31 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	7:21:31 PM	Tube furnace set to 0
8/8/2011	7:41:31 PM	Helium valve closed
8/8/2011	7:41:31 PM	H2 valve closed
8/8/2011	7:41:31 PM	BCl3 valve closed
8/8/2011	7:41:31 PM	PH3 valve closed
8/8/2011	7:41:31 PM	SiCl4 pre valve closed
8/8/2011	7:41:31 PM	SiCl4 post valve closed
8/8/2011	7:41:31 PM	Main Vac valve closed
8/8/2011	7:41:31 PM	Bypass valve closed
8/8/2011	7:41:31 PM	Bubbler valve closed
8/8/2011	7:41:31 PM	Helium MFC set to  0.000000
8/8/2011	7:41:31 PM	H2 MFC set to  0.000000
8/8/2011	7:41:31 PM	BCl3 MFC set to  0.000000
8/8/2011	7:41:31 PM	PHl3 MFC set to  0.000000
8/8/2011	7:41:31 PM	SiCl4 MFC set to  0.000000
8/8/2011	7:41:31 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	7:41:31 PM	Tube furnace set to 0
8/8/2011	7:41:32 PM	Run finished at 7:41 PM
8/8/2011	8:53:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	8:53:10 PM	Recipe started at 8:53 PM
8/8/2011	8:53:10 PM	Helium valve closed
8/8/2011	8:53:10 PM	H2 valve closed
8/8/2011	8:53:10 PM	BCl3 valve closed
8/8/2011	8:53:10 PM	PH3 valve closed
8/8/2011	8:53:10 PM	SiCl4 pre valve closed
8/8/2011	8:53:10 PM	SiCl4 post valve closed
8/8/2011	8:53:10 PM	Main Vac valve closed
8/8/2011	8:53:10 PM	Bypass valve closed
8/8/2011	8:53:10 PM	Bubbler valve closed
8/8/2011	8:53:10 PM	Helium MFC set to  0.000000
8/8/2011	8:53:10 PM	H2 MFC set to  0.000000
8/8/2011	8:53:10 PM	BCl3 MFC set to  0.000000
8/8/2011	8:53:10 PM	PHl3 MFC set to  0.000000
8/8/2011	8:53:10 PM	SiCl4 MFC set to  0.000000
8/8/2011	8:53:10 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	8:53:11 PM	Tube furnace set to 0
8/8/2011	8:53:14 PM	H2 valve closed
8/8/2011	8:53:14 PM	BCl3 valve closed
8/8/2011	8:53:14 PM	PH3 valve closed
8/8/2011	8:53:14 PM	SiCl4 pre valve closed
8/8/2011	8:53:14 PM	SiCl4 post valve closed
8/8/2011	8:53:14 PM	Main Vac valve closed
8/8/2011	8:53:14 PM	Bypass valve closed
8/8/2011	8:53:14 PM	Bubbler valve closed
8/8/2011	8:53:14 PM	Helium valve opened
8/8/2011	8:53:14 PM	Helium MFC set to  500.000000
8/8/2011	8:53:14 PM	H2 MFC set to  0.000000
8/8/2011	8:53:14 PM	BCl3 MFC set to  0.000000
8/8/2011	8:53:14 PM	PHl3 MFC set to  0.000000
8/8/2011	8:53:14 PM	SiCl4 MFC set to  0.000000
8/8/2011	8:53:14 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	8:53:14 PM	Tube furnace set to 0
8/8/2011	8:53:17 PM	Helium valve closed
8/8/2011	8:53:18 PM	H2 valve closed
8/8/2011	8:53:18 PM	BCl3 valve closed
8/8/2011	8:53:18 PM	PH3 valve closed
8/8/2011	8:53:18 PM	SiCl4 pre valve closed
8/8/2011	8:53:18 PM	SiCl4 post valve closed
8/8/2011	8:53:18 PM	Main Vac valve closed
8/8/2011	8:53:18 PM	Bypass valve closed
8/8/2011	8:53:18 PM	Bubbler valve closed
8/8/2011	8:53:18 PM	Helium MFC set to  0.000000
8/8/2011	8:53:18 PM	H2 MFC set to  0.000000
8/8/2011	8:53:18 PM	BCl3 MFC set to  0.000000
8/8/2011	8:53:18 PM	PHl3 MFC set to  0.000000
8/8/2011	8:53:18 PM	SiCl4 MFC set to  0.000000
8/8/2011	8:53:18 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	8:53:18 PM	Tube furnace set to 0
8/8/2011	8:53:19 PM	Run finished at 8:53 PM
8/8/2011	8:53:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	8:59:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	8:59:06 PM	Recipe started at 8:59 PM
8/8/2011	8:59:06 PM	Helium valve closed
8/8/2011	8:59:06 PM	H2 valve closed
8/8/2011	8:59:06 PM	BCl3 valve closed
8/8/2011	8:59:06 PM	PH3 valve closed
8/8/2011	8:59:06 PM	SiCl4 pre valve closed
8/8/2011	8:59:06 PM	SiCl4 post valve closed
8/8/2011	8:59:06 PM	Main Vac valve closed
8/8/2011	8:59:06 PM	Bubbler valve closed
8/8/2011	8:59:06 PM	Bypass valve opened
8/8/2011	8:59:06 PM	Helium MFC set to  0.000000
8/8/2011	8:59:06 PM	H2 MFC set to  0.000000
8/8/2011	8:59:06 PM	BCl3 MFC set to  0.000000
8/8/2011	8:59:06 PM	PHl3 MFC set to  0.000000
8/8/2011	8:59:06 PM	SiCl4 MFC set to  0.000000
8/8/2011	8:59:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	8:59:06 PM	Tube furnace set to 0
8/8/2011	9:00:13 PM	Helium valve closed
8/8/2011	9:00:13 PM	H2 valve closed
8/8/2011	9:00:13 PM	BCl3 valve closed
8/8/2011	9:00:13 PM	PH3 valve closed
8/8/2011	9:00:13 PM	SiCl4 pre valve closed
8/8/2011	9:00:13 PM	SiCl4 post valve closed
8/8/2011	9:00:13 PM	Main Vac valve closed
8/8/2011	9:00:13 PM	Bubbler valve closed
8/8/2011	9:00:13 PM	Bypass valve opened
8/8/2011	9:00:13 PM	Helium MFC set to  0.000000
8/8/2011	9:00:13 PM	H2 MFC set to  0.000000
8/8/2011	9:00:13 PM	BCl3 MFC set to  0.000000
8/8/2011	9:00:13 PM	PHl3 MFC set to  0.000000
8/8/2011	9:00:13 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:00:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:00:13 PM	Tube furnace set to 0
8/8/2011	9:01:13 PM	Helium valve closed
8/8/2011	9:01:13 PM	H2 valve closed
8/8/2011	9:01:13 PM	BCl3 valve closed
8/8/2011	9:01:13 PM	PH3 valve closed
8/8/2011	9:01:13 PM	SiCl4 pre valve closed
8/8/2011	9:01:13 PM	SiCl4 post valve closed
8/8/2011	9:01:13 PM	Bypass valve closed
8/8/2011	9:01:13 PM	Bubbler valve closed
8/8/2011	9:01:13 PM	Main Vac valve opened
8/8/2011	9:01:13 PM	Helium MFC set to  0.000000
8/8/2011	9:01:13 PM	H2 MFC set to  0.000000
8/8/2011	9:01:13 PM	BCl3 MFC set to  0.000000
8/8/2011	9:01:13 PM	PHl3 MFC set to  0.000000
8/8/2011	9:01:13 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:01:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:01:14 PM	Tube furnace set to 0
8/8/2011	9:01:15 PM	Run finished at 9:01 PM
8/8/2011	9:01:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	9:07:34 PM	Helium MFC set to  20.000000
8/8/2011	9:07:35 PM	Helium valve opened
8/8/2011	9:08:26 PM	Helium valve closed
8/8/2011	9:08:30 PM	Helium MFC set to  0.000000
8/8/2011	9:10:05 PM	Helium MFC set to  20.000000
8/8/2011	9:10:06 PM	Helium valve opened
8/8/2011	9:10:36 PM	Helium valve closed
8/8/2011	9:11:02 PM	Helium valve opened
8/8/2011	9:11:50 PM	Helium valve closed
8/8/2011	9:13:37 PM	Helium valve opened
8/8/2011	9:14:00 PM	Helium valve closed
8/8/2011	9:14:17 PM	Main Vac valve closed
8/8/2011	9:14:31 PM	Main Vac valve opened
8/8/2011	9:14:44 PM	Helium valve opened
8/8/2011	9:14:55 PM	Helium valve closed
8/8/2011	9:15:03 PM	Helium MFC set to  0.000000
8/8/2011	9:15:43 PM	Recipe started at 9:15 PM
8/8/2011	9:15:43 PM	Helium valve closed
8/8/2011	9:15:43 PM	H2 valve closed
8/8/2011	9:15:43 PM	BCl3 valve closed
8/8/2011	9:15:43 PM	PH3 valve closed
8/8/2011	9:15:43 PM	SiCl4 pre valve closed
8/8/2011	9:15:43 PM	SiCl4 post valve closed
8/8/2011	9:15:43 PM	Main Vac valve closed
8/8/2011	9:15:43 PM	Bypass valve closed
8/8/2011	9:15:43 PM	Bubbler valve closed
8/8/2011	9:15:43 PM	Helium MFC set to  0.000000
8/8/2011	9:15:43 PM	H2 MFC set to  0.000000
8/8/2011	9:15:43 PM	BCl3 MFC set to  0.000000
8/8/2011	9:15:43 PM	PHl3 MFC set to  0.000000
8/8/2011	9:15:43 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:15:43 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:15:43 PM	Tube furnace set to 0
8/8/2011	9:15:46 PM	Helium valve closed
8/8/2011	9:15:46 PM	BCl3 valve closed
8/8/2011	9:15:46 PM	PH3 valve closed
8/8/2011	9:15:46 PM	SiCl4 pre valve closed
8/8/2011	9:15:46 PM	SiCl4 post valve closed
8/8/2011	9:15:46 PM	Main Vac valve closed
8/8/2011	9:15:46 PM	Bypass valve closed
8/8/2011	9:15:46 PM	Bubbler valve closed
8/8/2011	9:15:46 PM	H2 valve opened
8/8/2011	9:15:46 PM	Helium MFC set to  0.000000
8/8/2011	9:15:46 PM	H2 MFC set to  500.000000
8/8/2011	9:15:46 PM	BCl3 MFC set to  0.000000
8/8/2011	9:15:46 PM	PHl3 MFC set to  0.000000
8/8/2011	9:15:46 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:15:46 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:15:46 PM	Tube furnace set to 0
8/8/2011	9:16:54 PM	Helium valve closed
8/8/2011	9:16:54 PM	BCl3 valve closed
8/8/2011	9:16:54 PM	PH3 valve closed
8/8/2011	9:16:54 PM	SiCl4 pre valve closed
8/8/2011	9:16:54 PM	SiCl4 post valve closed
8/8/2011	9:16:54 PM	Main Vac valve closed
8/8/2011	9:16:54 PM	Bypass valve closed
8/8/2011	9:16:54 PM	H2 valve opened
8/8/2011	9:16:54 PM	Bubbler valve opened
8/8/2011	9:16:54 PM	Helium MFC set to  0.000000
8/8/2011	9:16:54 PM	H2 MFC set to  500.000000
8/8/2011	9:16:54 PM	BCl3 MFC set to  0.000000
8/8/2011	9:16:54 PM	PHl3 MFC set to  0.000000
8/8/2011	9:16:54 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:16:54 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:16:54 PM	Tube furnace set to 0
8/8/2011	9:16:55 PM	Helium valve closed
8/8/2011	9:16:55 PM	BCl3 valve closed
8/8/2011	9:16:55 PM	PH3 valve closed
8/8/2011	9:16:55 PM	SiCl4 pre valve closed
8/8/2011	9:16:55 PM	SiCl4 post valve closed
8/8/2011	9:16:55 PM	Main Vac valve closed
8/8/2011	9:16:55 PM	Bypass valve closed
8/8/2011	9:16:55 PM	H2 valve opened
8/8/2011	9:16:55 PM	Bubbler valve opened
8/8/2011	9:16:55 PM	Helium MFC set to  0.000000
8/8/2011	9:16:55 PM	H2 MFC set to  500.000000
8/8/2011	9:16:55 PM	BCl3 MFC set to  0.000000
8/8/2011	9:16:55 PM	PHl3 MFC set to  0.000000
8/8/2011	9:16:55 PM	SiCl4 MFC set to  0.000000
8/8/2011	9:16:55 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:16:55 PM	Tube furnace set to 1000
8/8/2011	9:39:55 PM	Helium valve closed
8/8/2011	9:39:55 PM	PH3 valve closed
8/8/2011	9:39:55 PM	Main Vac valve closed
8/8/2011	9:39:55 PM	Bypass valve closed
8/8/2011	9:39:55 PM	H2 valve opened
8/8/2011	9:39:55 PM	BCl3 valve opened
8/8/2011	9:39:55 PM	SiCl4 pre valve opened
8/8/2011	9:39:55 PM	SiCl4 post valve opened
8/8/2011	9:39:55 PM	Bubbler valve opened
8/8/2011	9:39:55 PM	Helium MFC set to  0.000000
8/8/2011	9:39:55 PM	H2 MFC set to  500.000000
8/8/2011	9:39:55 PM	BCl3 MFC set to  2.200000
8/8/2011	9:39:55 PM	PHl3 MFC set to  0.000000
8/8/2011	9:39:55 PM	SiCl4 MFC set to  50.000000
8/8/2011	9:39:55 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	9:39:55 PM	Tube furnace set to 1000
8/8/2011	10:19:55 PM	Helium valve closed
8/8/2011	10:19:55 PM	BCl3 valve closed
8/8/2011	10:19:55 PM	PH3 valve closed
8/8/2011	10:19:55 PM	SiCl4 pre valve closed
8/8/2011	10:19:55 PM	SiCl4 post valve closed
8/8/2011	10:19:55 PM	Main Vac valve closed
8/8/2011	10:19:55 PM	Bypass valve closed
8/8/2011	10:19:55 PM	H2 valve opened
8/8/2011	10:19:55 PM	Bubbler valve opened
8/8/2011	10:19:55 PM	Helium MFC set to  0.000000
8/8/2011	10:19:55 PM	H2 MFC set to  500.000000
8/8/2011	10:19:55 PM	BCl3 MFC set to  0.000000
8/8/2011	10:19:55 PM	PHl3 MFC set to  0.000000
8/8/2011	10:19:55 PM	SiCl4 MFC set to  0.000000
8/8/2011	10:19:55 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:19:55 PM	Tube furnace set to 750
8/8/2011	10:24:55 PM	H2 valve closed
8/8/2011	10:24:55 PM	BCl3 valve closed
8/8/2011	10:24:55 PM	PH3 valve closed
8/8/2011	10:24:55 PM	SiCl4 pre valve closed
8/8/2011	10:24:55 PM	SiCl4 post valve closed
8/8/2011	10:24:55 PM	Main Vac valve closed
8/8/2011	10:24:55 PM	Bypass valve closed
8/8/2011	10:24:55 PM	Helium valve opened
8/8/2011	10:24:55 PM	Bubbler valve opened
8/8/2011	10:24:55 PM	Helium MFC set to  400.000000
8/8/2011	10:24:55 PM	H2 MFC set to  0.000000
8/8/2011	10:24:55 PM	BCl3 MFC set to  0.000000
8/8/2011	10:24:55 PM	PHl3 MFC set to  0.000000
8/8/2011	10:24:55 PM	SiCl4 MFC set to  0.000000
8/8/2011	10:24:55 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:24:56 PM	Tube furnace set to 0
8/8/2011	10:44:56 PM	Helium valve closed
8/8/2011	10:44:56 PM	H2 valve closed
8/8/2011	10:44:56 PM	BCl3 valve closed
8/8/2011	10:44:56 PM	PH3 valve closed
8/8/2011	10:44:56 PM	SiCl4 pre valve closed
8/8/2011	10:44:56 PM	SiCl4 post valve closed
8/8/2011	10:44:56 PM	Main Vac valve closed
8/8/2011	10:44:56 PM	Bypass valve closed
8/8/2011	10:44:56 PM	Bubbler valve closed
8/8/2011	10:44:56 PM	Helium MFC set to  0.000000
8/8/2011	10:44:56 PM	H2 MFC set to  0.000000
8/8/2011	10:44:56 PM	BCl3 MFC set to  0.000000
8/8/2011	10:44:56 PM	PHl3 MFC set to  0.000000
8/8/2011	10:44:56 PM	SiCl4 MFC set to  0.000000
8/8/2011	10:44:56 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	10:44:56 PM	Tube furnace set to 0
8/8/2011	11:35:47 PM	Run finished at 11:35 PM
8/8/2011	11:35:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:35:51 PM	Recipe started at 11:35 PM
8/8/2011	11:35:51 PM	Helium valve closed
8/8/2011	11:35:51 PM	H2 valve closed
8/8/2011	11:35:51 PM	BCl3 valve closed
8/8/2011	11:35:51 PM	PH3 valve closed
8/8/2011	11:35:51 PM	SiCl4 pre valve closed
8/8/2011	11:35:51 PM	SiCl4 post valve closed
8/8/2011	11:35:51 PM	Main Vac valve closed
8/8/2011	11:35:51 PM	Bypass valve closed
8/8/2011	11:35:51 PM	Bubbler valve closed
8/8/2011	11:35:51 PM	Helium MFC set to  0.000000
8/8/2011	11:35:51 PM	H2 MFC set to  0.000000
8/8/2011	11:35:51 PM	BCl3 MFC set to  0.000000
8/8/2011	11:35:51 PM	PHl3 MFC set to  0.000000
8/8/2011	11:35:51 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:35:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:35:51 PM	Tube furnace set to 0
8/8/2011	11:35:54 PM	H2 valve closed
8/8/2011	11:35:54 PM	BCl3 valve closed
8/8/2011	11:35:54 PM	PH3 valve closed
8/8/2011	11:35:54 PM	SiCl4 pre valve closed
8/8/2011	11:35:54 PM	SiCl4 post valve closed
8/8/2011	11:35:54 PM	Main Vac valve closed
8/8/2011	11:35:54 PM	Bypass valve closed
8/8/2011	11:35:54 PM	Bubbler valve closed
8/8/2011	11:35:54 PM	Helium valve opened
8/8/2011	11:35:54 PM	Helium MFC set to  500.000000
8/8/2011	11:35:54 PM	H2 MFC set to  0.000000
8/8/2011	11:35:54 PM	BCl3 MFC set to  0.000000
8/8/2011	11:35:54 PM	PHl3 MFC set to  0.000000
8/8/2011	11:35:54 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:35:54 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:35:54 PM	Tube furnace set to 0
8/8/2011	11:35:59 PM	Helium valve closed
8/8/2011	11:35:59 PM	H2 valve closed
8/8/2011	11:35:59 PM	BCl3 valve closed
8/8/2011	11:35:59 PM	PH3 valve closed
8/8/2011	11:35:59 PM	SiCl4 pre valve closed
8/8/2011	11:35:59 PM	SiCl4 post valve closed
8/8/2011	11:35:59 PM	Main Vac valve closed
8/8/2011	11:35:59 PM	Bypass valve closed
8/8/2011	11:35:59 PM	Bubbler valve closed
8/8/2011	11:35:59 PM	Helium MFC set to  0.000000
8/8/2011	11:35:59 PM	H2 MFC set to  0.000000
8/8/2011	11:35:59 PM	BCl3 MFC set to  0.000000
8/8/2011	11:35:59 PM	PHl3 MFC set to  0.000000
8/8/2011	11:35:59 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:35:59 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:35:59 PM	Tube furnace set to 0
8/8/2011	11:36:00 PM	Run finished at 11:36 PM
8/8/2011	11:36:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2011	11:37:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2011	11:37:41 PM	Recipe started at 11:37 PM
8/8/2011	11:37:41 PM	Helium valve closed
8/8/2011	11:37:41 PM	H2 valve closed
8/8/2011	11:37:41 PM	BCl3 valve closed
8/8/2011	11:37:41 PM	PH3 valve closed
8/8/2011	11:37:41 PM	SiCl4 pre valve closed
8/8/2011	11:37:41 PM	SiCl4 post valve closed
8/8/2011	11:37:41 PM	Main Vac valve closed
8/8/2011	11:37:41 PM	Bubbler valve closed
8/8/2011	11:37:41 PM	Bypass valve opened
8/8/2011	11:37:41 PM	Helium MFC set to  0.000000
8/8/2011	11:37:41 PM	H2 MFC set to  0.000000
8/8/2011	11:37:41 PM	BCl3 MFC set to  0.000000
8/8/2011	11:37:41 PM	PHl3 MFC set to  0.000000
8/8/2011	11:37:41 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:37:41 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:37:41 PM	Tube furnace set to 0
8/8/2011	11:38:39 PM	Helium valve closed
8/8/2011	11:38:39 PM	H2 valve closed
8/8/2011	11:38:39 PM	BCl3 valve closed
8/8/2011	11:38:39 PM	PH3 valve closed
8/8/2011	11:38:39 PM	SiCl4 pre valve closed
8/8/2011	11:38:39 PM	SiCl4 post valve closed
8/8/2011	11:38:39 PM	Main Vac valve closed
8/8/2011	11:38:39 PM	Bubbler valve closed
8/8/2011	11:38:39 PM	Bypass valve opened
8/8/2011	11:38:39 PM	Helium MFC set to  0.000000
8/8/2011	11:38:39 PM	H2 MFC set to  0.000000
8/8/2011	11:38:39 PM	BCl3 MFC set to  0.000000
8/8/2011	11:38:39 PM	PHl3 MFC set to  0.000000
8/8/2011	11:38:39 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:38:39 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:38:39 PM	Tube furnace set to 0
8/8/2011	11:39:39 PM	Helium valve closed
8/8/2011	11:39:39 PM	H2 valve closed
8/8/2011	11:39:39 PM	BCl3 valve closed
8/8/2011	11:39:39 PM	PH3 valve closed
8/8/2011	11:39:39 PM	SiCl4 pre valve closed
8/8/2011	11:39:39 PM	SiCl4 post valve closed
8/8/2011	11:39:39 PM	Bypass valve closed
8/8/2011	11:39:39 PM	Bubbler valve closed
8/8/2011	11:39:39 PM	Main Vac valve opened
8/8/2011	11:39:39 PM	Helium MFC set to  0.000000
8/8/2011	11:39:39 PM	H2 MFC set to  0.000000
8/8/2011	11:39:39 PM	BCl3 MFC set to  0.000000
8/8/2011	11:39:39 PM	PHl3 MFC set to  0.000000
8/8/2011	11:39:39 PM	SiCl4 MFC set to  0.000000
8/8/2011	11:39:39 PM	Bypass solenoid MFC set to  0.000000
8/8/2011	11:39:39 PM	Tube furnace set to 0
8/8/2011	11:39:40 PM	Run finished at 11:39 PM
8/8/2011	11:39:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
